High-precision polishing equipment for graphite slices

A high-precision, slicing technology, which is applied in the direction of grinding/polishing equipment, metal processing equipment, surface polishing machine tools, etc., can solve the problem of inability to achieve the polishing accuracy of graphite slices, the rough position adjustment of the polishing device of the transmission device, and the inability to adapt to individual graphite materials Differences and other issues, to achieve the effect of strengthening the vacuum adsorption effect, avoiding excessive polishing, and improving the vacuum adsorption effect

Pending Publication Date: 2020-08-14
ZHEJIANG HAROG TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although this invention effectively reduces labor and greatly improves production efficiency, the polishing device always performs polishing operations on the same horizontal plane, which cannot adapt to individual differences in graphite materials, and the adjustment of the position of the polishing device by the transmission device is relatively rough, so this invention cannot Achieve the polishing precision required for graphite slices

Method used

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  • High-precision polishing equipment for graphite slices
  • High-precision polishing equipment for graphite slices
  • High-precision polishing equipment for graphite slices

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0033] A high-precision polishing equipment for graphite slices, such as figure 1 and figure 2 shown, including:

[0034] - frame 1, said frame 1 is provided with two parallel slide rails 4;

[0035] - workbench 2, installed on the frame 1 through the slide rail 4; the upper surface of the workbench 2 is provided with some small holes 21 communicated with the vacuum pipeline 6, and the diameter of the small hole is 1.0cm; the vacuum pipeline 6 is connected to the vacuum generator; a lead screw 5 parallel to the slide rail 4 and installed on the frame 1 is provided under the workbench 2, and the supporting seat set on the lead screw 5 is connected with the working The table 2 is fixedly connected, and the lead screw 5 is driven to rotate by a motor;

[0036] - The grinding assembly 3 includes a lifting base 31, the lifting base 31 is adjusted to lift through the rotating part 311 on its upper surface, and the outer circumference of the rotating part 311 is marked with scale...

Embodiment 2

[0040] This embodiment is a high-precision polishing equipment for graphite slices, the basic structure is the same as that of Embodiment 1, and on the basis of Embodiment 1, it also has the following structural features:

[0041] The mounting seat 35 is slidingly connected with the frame 1 . Specifically, the mounting base 35 is provided with a slider, and the sliding block cooperates with the electric guide rail provided on the frame to realize the mounting base 35 moving along the translational direction of the workbench 2, thereby realizing the translation of the polishing disc 34 in this direction, The equipment can not only realize the adjustment of the graphite slice polishing position through the translation of the workbench 2, but also realize the translation of the mounting seat 35, which has higher flexibility; the table structure of the workbench 2 is as follows: image 3 As shown, the surface of the workbench 2 is provided with two recessed areas 23 for placing an...

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Abstract

The invention belongs to the technical field of graphite product machining equipment, and particularly discloses high-precision polishing equipment for graphite slices. The high-precision polishing equipment for the graphite slices comprises a rack, a workbench and a grinding assembly. Small holes are formed in the surface of the workbench for vacuumizing to adsorb and fix the graphite slices, double sliding rails and the grinding assembly are arranged on the rack for adjustment of polishing positions, and the relatively high polishing precision is obtained preliminarily; annular channels communicating with the small holes are formed in the peripheries of the small holes to enhance the vacuum adsorption effect, with the arrangement of a concave area of the workbench combined, it is guaranteed that the graphite slices cannot deviate in position in the polishing process, and the polishing precision is improved; and through the three-layer structural design of a metal layer, a rubber layer and a polishing layer of a polishing disc, the stability of the grinding assembly is improved, and the polishing precision is further improved; in addition, the high-precision polishing equipment for the graphite slices also has the characteristics that the operation is easy, the safety is high, the polishing layer can be easily replaced, and the polishing efficiency is high.

Description

technical field [0001] The invention relates to the technical field of graphite product processing equipment, in particular to a high-precision polishing equipment for graphite slices. Background technique [0002] As the carrier of silicon wafers, graphite boat is an important tool in PECVD coating process, which is assembled from several graphite boats. The processing of graphite boats first requires cutting graphite blocks to obtain graphite slices. Due to the rough surface of the cut graphite slices, they must be polished to reduce their impact on the subsequent silicon wafer coating process. For the polishing of graphite slices, the traditional method is to use manual operation, which is not only time-consuming and laborious, but also difficult to control the strength and position, and cannot meet the polishing requirements. At present, there are also some automatic polishing equipment for graphite materials, but most of them only automate the operation of polishing pa...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B24B29/02B24B41/02B24B41/06B24B47/12B24B47/22B24B49/00B24D13/14
CPCB24B29/02B24B41/02B24B41/06B24B47/12B24B47/22B24B49/00B24D13/14
Inventor 周志强
Owner ZHEJIANG HAROG TECH CO LTD
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