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Piezoelectric sensor

A piezoelectric sensor and piezoelectric film technology, applied in the field of sensors, can solve the problems of low sensitivity of piezoelectric sensors affecting sensor performance, etc., and achieve ideal softness and impact strength, good flexural deformation, and low flexural modulus.

Pending Publication Date: 2020-08-25
HUAIYIN TEACHERS COLLEGE
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  • Summary
  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

[0005] In order to make up for the deficiencies of the prior art and solve the problem that the low sensitivity of the existing piezoelectric sensor affects the performance of the sensor, a piezoelectric sensor proposed by the present invention

Method used

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Embodiment approach

[0027]As an embodiment of the present invention, the piezoelectric thin film 6 is a laminate formed by laminating a plurality of film-like piezoelectric bodies, and the film-like piezoelectric body is a vinylidene fluoride-tetrafluoroethylene-based copolymer. electric body; the existing piezoelectric film 6 is mostly made of polyvinylidene fluoride material, and the voltage of the electrical signal actually measured has a tendency that the smaller the frequency is, the lower the measured voltage is, and the larger the frequency is, the higher the measured voltage is. The invention uses vinylidene fluoride-tetrafluoroethylene copolymer to make piezoelectric film 6, which has a larger output electrical signal from ultra-low frequency to high frequency region than polyvinylidene fluoride material, so it can make piezoelectric film 6 The frequency dependence of the output electrical signal of the thin film 6 becomes smaller, which improves the sensitivity of the piezoelectric senso...

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Abstract

The invention relates to the technical field of sensors, in particular to a piezoelectric sensor which comprises a substrate, a lower electrode arranged on the substrate, a piezoelectric film arrangedon the lower electrode and an upper electrode arranged on the piezoelectric film. The substrate comprises silicon-based bottom plates, a flexible arc-shaped substrate and a flexible top plate. An auxiliary notch is formed between the silicon-based bottom plates, the flexible arc-shaped substrate which is arched upwards is arranged between the two side edges of the auxiliary notch, and the flexible arc-shaped substrate and the flexible top plate are made of polydimethylsiloxane. According to the invention, the structure of the piezoelectric sensor is changed to optimize the corresponding resonant frequency and effective mass distribution state, so that the sensitivity of the piezoelectric sensor is improved.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to a piezoelectric sensor. Background technique [0002] As a transducer that converts mechanical energy and electrical energy, the sensor has been widely used in consumer electronics products such as mobile phones, computers, cameras, industry, life and health monitoring and other fields. Traditional sensors mainly include capacitive and piezoelectric sensors. The capacitive sensor adopts a double-layer film structure, and uses the principle of charging and discharging capacitance between conductors to change the voltage between conductors, thereby realizing the conversion of mechanical energy to electrical energy. Although the capacitive sensor has the advantages of a very wide frequency response range and fast instantaneous response, but the capacitive sensor is fragile, afraid of the tide and falling, and requires DC voltage, so there are still big problems in practical applicat...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L41/113H01L41/047H10N30/30H10N30/87
CPCH10N30/875H10N30/302
Inventor 马春林程菊冯小勤
Owner HUAIYIN TEACHERS COLLEGE
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