Cleaning device and cleaning method for optical coating clamp

Abstract

The invention relates to a cleaning device and a cleaning method for an optical coating clamp. The cleaning device for the optical coating clamp comprises a direct-current power supply, an ultrasonicoscillator and a reaction container. The cleaning method of the cleaning device for the optical coating clamp comprises the following steps that (1), the direct-current power supply is started, and the optical coating clamp is subjected to electrochemical corrosion; (2), the ultrasonic oscillator and the direct-current power supply simultaneously work to clean the optical coating clamp; (3), the optical coating clamp is washed; (4), the optical coating clamp is blown for drying; and (5), the optical coating clamp is dried. According to the cleaning device and method for the optical coating clamp, the optical coating clamp is pretreated firstly, then a surface film layer of the optical coating clamp is treated through the method of combining electrochemical corrosion and ultrasonic oscillation, and compared with a traditional chemical soaking method and a traditional ultrasonic cleaning method, the cleaning time is short, and the cleaning efficiency is high.

Description

technical field [0001] The invention relates to a cleaning device and a cleaning method for an optical coating fixture, belonging to the field of vacuum coating cleaning on the cavity surface of a semiconductor laser. Background technique [0002] Semiconductor lasers are widely used in various fields due to their unique advantages. Semiconductor lasers have been pursuing the characteristics of high power, high conversion efficiency, and long life. Therefore, semiconductor lasers need to be coated on the cavity surface to optimize their reflectivity. Vacuum coating on the cavity surface of semiconductor lasers refers to the process of coating several layers (or dozens of layers) of dielectric films on the cavity surface after cleavage. The purpose of vacuum coating is to increase or reduce the reflectivity of the cavity surface of semiconductor lasers and protect The cavity surface is not polluted by the external environment. The process of vacuum coating process is a proc...

AI Technical Summary

Problems solved by technology

However, due to the precision and delicateness of the coating fixture, it is impossible to attach aluminum foil paper, and sandblasting will cause its deformation and make it unusable

At present, it is generally used to soak the fixture in alkaline solution, but this method takes a long time, has low efficiency and cannot clean some hidden corners thoroughly.

[0004] Chinese patent CN 204237864 U discloses a cleaning device for coating machine clamps. The device includes guide rails, transmission chains, lye tanks, washing tanks, heating devices, drying devices and controllers. The guide rails form a rectangle, and the transmission chains are along the The guide rail is set under the guide rail, the running mode of the transmission chain is counterclockwise, the transmission chain is evenly provided with suspension rings, and a hook is provided under each suspension ring, and two downward protrusions on the guide rail are respectively provided with There are lye tank and water washing tank. The lye tank is provided with a heating device, which can clean the coating fixtures in batches, but the cleaning effect of the cleaning device provided by the invention is not thorough, and the lye immersion alone cannot effectively make the clamps The membrane material falls off completely

However, the invention is soaked in cleaning solution, resulting in slow cleaning speed and incomplete cleaning.

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