Thermal noise suppression method and system for low-temperature laser interferometry optical system

Abstract

The invention relates to a thermal noise suppression method and system for a low-temperature laser interferometry optical system. Reaction gas output by a first mass flow meter and rare gas output bya second mass flow meter are fully mixed in a standard working gas device to obtain standard working gas, and the standard working gas device introduces the standard working gas into a radio frequencyplasma generator; a radio frequency plasma generator generates mixture plasma through radio frequency discharge and introduces the mixture plasma into a vacuum cavity where the to-be-processed optical component is located, the mixture plasma interacts with the surface of the to-be-processed optical component, and thermal noise processing of the to-be-processed optical component is completed. According to the method and the system, the characteristics of the surface material of the component are changed by utilizing the mixture plasmas, the surface loss is reduced, the problem of thermal noisecaused by the surface loss is solved, the measurement sensitivity is improved, and meanwhile, the method and the system have the compatibility and online in-situ processing capacity of ultralow-temperature and ultrahigh-vacuum environments and are effective and reliable.

Description

technical field [0001] The invention relates to the technical field of laser interferometric precision measurement, in particular to a method and system for suppressing thermal noise of a low-temperature laser interferometric optical system. Background technique [0002] Laser interferometry is a method of precise measurement using laser as the light source, based on the laser wavelength or laser frequency, using the interference principle of light. It has the advantages of high sensitivity, high measurement accuracy and non-contact measurement. Surface shape, medium refractive index change, vibration and other aspects are widely used. Thermal noise is a key factor affecting the measurement accuracy and sensitivity of laser interferometry optical systems, and low temperature is the most effective technology for thermal noise suppression. However, due to the critical value of the lowest temperature, there is also a limit to the suppression of thermal noise by low temperature...

AI Technical Summary

Problems solved by technology

The invention adopts the plasma noise suppression technology, utilizes the physical sputtering and chemical etching effects of the plasma, changes the characteristics of the surface material of the component, reduces the surface loss, and thus solves the problem of thermal noise caused by the surface loss

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