A Thermal Noise Suppression System for Low Temperature Laser Interferometry Optical System

Abstract

The invention relates to a thermal noise suppression method and system of a low-temperature laser interferometry optical system. The reaction gas output by the first mass flowmeter and the rare gas output by the second mass flowmeter are fully mixed in a standard working gas device to obtain a standard working gas. The standard working gas device passes the standard working gas into the radio frequency plasma generator; the radio frequency plasma generator generates a mixture plasma through radio frequency discharge and passes the mixture plasma into the vacuum chamber where the optical component to be processed is located, and the mixture plasma and the to-be-processed The surface of the optical component interacts to complete the thermal noise treatment of the optical component to be treated. The invention uses the mixture plasma to change the characteristics of the surface material of the component, reduces the surface loss, solves the problem of thermal noise caused by the surface loss, improves the measurement sensitivity, and has compatibility with ultra-low temperature and ultra-high vacuum environments and online in-situ processing capabilities. An effective and reliable thermal noise suppression method and system.

Description

technical field [0001] The invention relates to the technical field of laser interferometric precision measurement, in particular to a thermal noise suppression system of a low-temperature laser interferometric optical system. Background technique [0002] Laser interferometry is a method of precise measurement using laser as the light source, based on the laser wavelength or laser frequency, using the interference principle of light. It has the advantages of high sensitivity, high measurement accuracy and non-contact measurement. Surface shape, medium refractive index change, vibration and other aspects are widely used. Thermal noise is a key factor affecting the measurement accuracy and sensitivity of laser interferometry optical systems, and low temperature is the most effective technology for thermal noise suppression. However, due to the critical value of the lowest temperature, there is also a limit to the suppression of thermal noise by low temperature. How to furth...

AI Technical Summary

Problems solved by technology

The invention adopts the plasma noise suppression technology, utilizes the physical sputtering and chemical etching effects of the plasma, changes the characteristics of the surface material of the component, reduces the surface loss, and thus solves the problem of thermal noise caused by the surface loss

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