Welding method for WTi target and copper back plate

A welding method and technology of copper backplane, applied in welding equipment, welding/welding/cutting items, non-electric welding equipment, etc., can solve problems such as short service life, unsatisfactory sputtering effect, and easy cracking of WTi

Active Publication Date: 2020-10-30
KONFOONG MATERIALS INTERNATIONAL CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The thermal expansion coefficients of the WTi target and the aluminum alloy material are several times different. After diffusion welding, the two will have a large deformation. Shooting effect is not ideal

Method used

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  • Welding method for WTi target and copper back plate

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0043] This embodiment provides a welding method for a WTi target and a copper back plate. The welding method includes: assembling the WTi target 2, the copper back plate 3 and the cover plate 1, and then putting them into the sheath and removing them sequentially. Gas treatment and welding;

[0044] Wherein, the welding surface of the WTi target 2 is provided with an inverted triangular groove; the welding surface of the copper back plate 3 is sequentially subjected to acid treatment and alkali treatment; 2 is a centrally symmetrical assembly, such as figure 1 shown; the maximum width of the groove is 4mm; the vertical depth of the groove is 1.7mm; the pitch of the groove is 7mm; the acid treatment is to use acid solution to process the copper back plate welding surface; the acid The solution is concentrated hydrochloric acid; the time of the acid treatment is 30min; the alkali treatment is to use an alkali solution to process the welding surface of the copper backboard; the...

Embodiment 2

[0047] This embodiment provides a welding method for a WTi target material and a copper back plate, the welding method includes: assembling the WTi target material, copper back plate and cover plate, and then putting them into a sheath for degassing treatment and welding;

[0048] Wherein, the welding surface of the WTi target is provided with a groove; the welding surface of the copper back plate is sequentially subjected to acid treatment and alkali treatment; the assembly is a symmetrical assembly of the copper back plate and the cover plate centered on the WTi target; The maximum width of the groove is 3mm; the vertical depth of the groove is 2mm; the distance between the grooves is 6mm; the acid treatment is to use an acid solution to process the welding surface of the copper backboard; the acid solution is concentrated nitric acid; The time of the acid treatment is 40min; the alkali treatment is to use an alkali solution to process the welding surface of the copper backb...

Embodiment 3

[0051] This embodiment provides a welding method for a WTi target material and a copper back plate, the welding method includes: assembling the WTi target material, copper back plate and cover plate, and then putting them into a sheath for degassing treatment and welding;

[0052] Wherein, the welding surface of the WTi target is provided with a groove; the welding surface of the copper back plate is sequentially subjected to acid treatment and alkali treatment; the assembly is a symmetrical assembly of the copper back plate and the cover plate centered on the WTi target; The maximum width of the groove is 5mm; the vertical depth of the groove is 1.2mm; the distance between the grooves is 8mm; the acid treatment is to use an acid solution to process the welding surface of the copper backboard; the acid solution is concentrated hydrochloric acid The time of the acid treatment is 20min; the alkali treatment is to use an alkali solution to process the welding surface of the coppe...

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Abstract

The invention relates to a welding method for a WTi target and a copper back plate. The welding method comprises the following steps: assembling the WTi target, the copper back plate and a cover plate; then putting an assembled body into a sheath for degassing and welding in sequence, wherein the welding face of the WTi target is provided with a groove; and carrying out acid treatment and alkali treatment on the welding face of the copper back plate in sequence. The assembly means symmetric assembly of the copper back plate and the cover plate with the WTi target as the center. According to the welding method provided by the invention, by arranging the groove on the welding face of the target, carrying out acid treatment and alkali treatment on the welding face of the back plate and usinga specific assembling mode, effective welding of the WTi target and the copper back plate is realized, and internal stress is reduced at the same time; in addition, no cracks after discharging are produced; and meanwhile, the phenomena of point discharge, arc discharge and the like in the use process are also effectively avoided.

Description

technical field [0001] The invention relates to the field of welding target components, in particular to a welding method for a WTi target and a copper back plate. Background technique [0002] The WTi target is made by powder metallurgy sintering. After sintering, the hardness is relatively high, and the product is relatively brittle. It is not easy to carry out diffusion welding with aluminum alloy or copper alloy backplane materials, and it is prone to cracks or even cracks when subjected to large stress. [0003] CN103834923A discloses a method for making a tungsten-titanium target. In this method, after loading tungsten-titanium alloy powder into a vacuum hot-pressing sintering mold, the tungsten-titanium alloy powder located in the edge area of ​​the vacuum hot-pressing sintering mold is first subjected to a second step. After the first compaction, the second compaction is performed on the entire tungsten-titanium alloy powder. After the first compaction and the second...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23K20/00B23K20/14B23K20/24C23G1/10C23G1/20B23K103/18
CPCB23K20/001B23K20/14B23K20/24C23G1/10C23G1/205B23K2103/18
Inventor 姚力军边逸军潘杰王学泽廖培君罗明浩
Owner KONFOONG MATERIALS INTERNATIONAL CO LTD
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