Transmission electron microscope system and method for realizing optical focusing and continuous scanning
A technology of transmission electron microscopy and electron microscopy, which is used in material analysis by optical means, scientific instruments, fluorescence/phosphorescence, etc.
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Embodiment 1
[0034] The transmission electron microscope system in this embodiment includes two parts: a transmission electron microscope and a laser guidance system. The transmission electron microscope can be a commercial transmission electron microscope. The present invention modifies the sample rod part and introduces a spectroscopic measurement part. The structure of the laser guidance system is as follows figure 1 As shown, it has the function of digital optical phase conjugation.
[0035] When the transmission electron microscope system is used, the sample rod is installed in the transmission electron microscope, and the electron beam of the transmission electron microscope is perpendicular to the sample rod for electron beam emission and focusing (for example, from figure 2 The paper faces outwards to emit and focus the electron beam), and the working principle of the transmission electron microscope will not be described in detail here.
[0036] Such as figure 1 As shown, the l...
Embodiment 2
[0048] image 3 It is a schematic structural diagram of the spectroscopy part of the transmission electron microscopy system in Example 2 of the present invention.
[0049] The sample rod used in this embodiment is the same as that in Embodiment 1, and will not be described in detail here.
[0050] The TEM system of the present embodiment includes: a femtosecond ultrafast laser 101, a first beam expander collimator 102, a second beam expander collimator 109, a first flip mirror 103, a second flip mirror 105, a third flip mirror Flip mirror 110, interference autocorrelation optical path part 104, first mirror 106, second mirror 107, third mirror 113, fourth mirror 118, single-mode semiconductor laser 108, polarization beam splitter prism 111, spatial light modulation Device 114, first lens 115, second lens 120, dichroic prism 116, first microscopic objective lens 117, second microscopic objective lens 119, sample rod 112 (shared with transmission electron microscope) with opti...
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