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A transmission electron microscope system and method for realizing optical focusing and continuous scanning

A technology of optical focusing and transmission electron microscopy, which is used in material analysis by optical means, scientific instruments, fluorescence/phosphorescence, etc. It can solve the problems of inability to measure the spectral properties of materials and ultrafast kinetic processes, and achieve continuous two-dimensional scanning Effect

Active Publication Date: 2021-07-20
INST OF PHYSICS - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The purpose of this technology is to solve the technical problems that the current transmission electron microscopy technology cannot measure the spectral properties and ultrafast kinetics of materials, so as to realize the in situ study of the microstructure and properties of materials

Method used

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  • A transmission electron microscope system and method for realizing optical focusing and continuous scanning
  • A transmission electron microscope system and method for realizing optical focusing and continuous scanning
  • A transmission electron microscope system and method for realizing optical focusing and continuous scanning

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Embodiment 1

[0034] The transmission electron microscope system in this embodiment includes two parts: a transmission electron microscope and a laser guidance system. The transmission electron microscope can be a commercial transmission electron microscope. The present invention modifies the sample rod part and introduces a spectroscopic measurement part. The structure of the laser guidance system is as follows figure 1 As shown, it has the function of digital optical phase conjugation.

[0035] When the transmission electron microscope system is used, the sample rod is installed in the transmission electron microscope, and the electron beam of the transmission electron microscope is perpendicular to the sample rod for electron beam emission and focusing (for example, from figure 2 The paper faces outwards to emit and focus the electron beam), and the working principle of the transmission electron microscope will not be described in detail here.

[0036] Such as figure 1 As shown, the l...

Embodiment 2

[0048] image 3 It is a schematic structural diagram of the spectroscopy part of the transmission electron microscopy system in Example 2 of the present invention.

[0049] The sample rod used in this embodiment is the same as that in Embodiment 1, and will not be described in detail here.

[0050] The TEM system of the present embodiment includes: a femtosecond ultrafast laser 101, a first beam expander collimator 102, a second beam expander collimator 109, a first flip mirror 103, a second flip mirror 105, a third flip mirror Flip mirror 110, interference autocorrelation optical path part 104, first mirror 106, second mirror 107, third mirror 113, fourth mirror 118, single-mode semiconductor laser 108, polarization beam splitter prism 111, spatial light modulation Device 114, first lens 115, second lens 120, dichroic prism 116, first microscopic objective lens 117, second microscopic objective lens 119, sample rod 112 (shared with transmission electron microscope) with opti...

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Abstract

The invention provides a transmission electron microscope system and method for realizing optical focusing and continuous scanning. The transmission electron microscope system includes a transmission electron microscope and a laser guiding system, the transmission electron microscope has a sample rod, the imaging direction of the transmission electron microscope is perpendicular to the sample rod, the inside of the sample rod has an optical fiber bundle, and the laser The guiding system includes a spatial light modulator and an image acquisition device, the laser guiding system guides polarized laser light into the optical fiber bundle from one end of the optical fiber bundle, and exits from the other end of the optical fiber bundle to the image acquisition device, The image acquisition device is used to directly or indirectly acquire the phase information loaded on the spatial light modulator. The invention realizes the transmission electron microscope with optical focusing and continuous scanning of the focus through the loading of the spatial light modulator, and can realize continuous scanning of the focus on the basis of laser focusing, thereby completing spectroscopic measurement and imaging in the transmission electron microscope.

Description

technical field [0001] The invention relates to the technical field of transmission electron microscopy, and more specifically, to a transmission electron microscope system and method for realizing optical focusing and continuous scanning of the focus. Background technique [0002] Exploring the correspondence between the atomic structure and electronic structure of materials and their physical properties is one of the most important tasks in condensed matter physics research, and it is still a challenge in experimental technology. Spectroscopy technology can be used to study the spectral generation of materials and their interaction with matter. The ultrafast dynamic process reflects the basic motion laws of the microscopic material structure and the intrinsic properties of materials. It has always been a direction that has been valued in natural science research. It has important application prospects, such as dynamic process and atomic energy level structure. The develop...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N23/04G01N23/20008G01N21/01G01N21/25G01N21/63G01N21/64G01N21/47
CPCG01N21/01G01N21/25G01N21/47G01N21/63G01N21/64G01N23/04G01N23/20008G01N2021/0112
Inventor 马超杰刘畅刘开辉王恩哥白雪冬
Owner INST OF PHYSICS - CHINESE ACAD OF SCI
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