High-vacuum surface-mounted miniature tuning fork quartz crystal resonator and manufacturing method thereof

A surface mount, quartz crystal technology, applied in the direction of electrical components, impedance networks, etc., can solve the problems of defective resonator quality, no treatment measures for gas impurities, etc., and achieve low equivalent impedance ESR, long service life, and sealing good performance

Pending Publication Date: 2020-11-10
HUBEI TKD ELECTRONICS TECH
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  • Abstract
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  • Claims
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Problems solved by technology

In the above-mentioned invention, although the resonator is vacuumized during production, there is no treatment for

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  • High-vacuum surface-mounted miniature tuning fork quartz crystal resonator and manufacturing method thereof
  • High-vacuum surface-mounted miniature tuning fork quartz crystal resonator and manufacturing method thereof
  • High-vacuum surface-mounted miniature tuning fork quartz crystal resonator and manufacturing method thereof

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[0036] The present invention will be described in further detail below in conjunction with the description of the drawings and specific embodiments.

[0037] Micro tuning fork chip structure see figure 1 , a high-vacuum surface-mounted miniature tuning fork quartz crystal resonator, comprising a ceramic base 1, a miniature tuning fork wafer b002 and a metal cover plate d001, the miniature tuning fork wafer b002 is located in the ceramic base 1, and the miniature tuning fork wafer b002 The electrodes are adhered to the internal electrodes of the ceramic base 1 through conductive glue, the internal electrode lines of the ceramic base 1 are connected to the external electrodes of the ceramic base 1, and the ceramic base 1 consists of a ceramic base plate b006, a ceramic backing plate b005, The ceramic ring plate b004 and the Kovar alloy ring b003 are stacked in sequence from bottom to top. The ceramic ring plate b004 provides a height space for the tuning fork wafer. The ceramic ...

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Abstract

The invention relates to a high-vacuum surface-mounted miniature tuning fork quartz crystal resonator and a manufacturing method thereof. The resonator comprises a ceramic base, a miniature tuning fork wafer and a metal cover plate; the ceramic base is formed by sequentially superposing a ceramic bottom plate, a ceramic backing plate, a ceramic ring plate and a kovar alloy ring from bottom to top,wherein the bottom of the ceramic bottom plate is provided with a metal pad, and a left protruding bonding pad and a right protruding bonding pad are arranged on the ceramic backing plate. The resonator is manufactured through a high-vacuum baking degassing process, a sealing nitrogen parallel seam welding process and a high-vacuum laser spot welding process. The manufacturing method is simple and rapid, and the manufactured resonator is reliable in quality, long in service life and excellent in electrical performance.

Description

technical field [0001] The invention relates to the technical field of electronic devices, in particular to a high-vacuum surface mounted miniature tuning fork quartz crystal resonator and a manufacturing method thereof. Background technique [0002] With the rapid growth of consumer electronics products (such as digital cameras, mobile phones, e-books, etc.), miniaturization and low-cost products are an important part of occupying the market in order to meet market demand, but low-cost glass packaging is difficult to overcome How to apply the sealing technology under vacuum to the tuning fork type quartz crystal resonator (that is, the glass cannot be sealed in vacuum in the molten state) is a major factor that needs to be overcome in the manufacturing technology. [0003] Chinese Patent Application Publication No. CN102324909A, the invention patent of which the application publication date is January 18, 2012 discloses a glass-encapsulated tuning-fork quartz crystal resona...

Claims

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Application Information

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IPC IPC(8): H03H9/19H03H9/215
CPCH03H9/19H03H9/215
Inventor 喻信东钟院华张小伟詹超
Owner HUBEI TKD ELECTRONICS TECH
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