Non-isoplanatic aberration correction method and device for adaptive optical line beam scanning imaging
An adaptive optics, scanning imaging technology, applied in optics, optical components, image enhancement and other directions, can solve the problems of high control complexity, high technical cost, slow imaging speed, etc. Difference correction, low cost effect
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[0045] Example 1
[0046] Such as figure 1 As shown, a non-isoplanar aberration correction method for adaptive optics line beam scanning imaging includes: in an adaptive optics line-beam scanning imaging system, performing non-isoplanar aberration in the scanning direction of the line beam Time-sharing correction and regional correction of non-isoplanar aberrations in the direction of the line beam are as follows:
[0047] 1. Time-sharing correction of non-isoplanar aberration in the scanning direction of the line beam:
[0048] Step S1: According to the scanning time, the imaging area of the non-iso-halo zone is divided into multiple sub-imaging areas in the scanning direction, including sub-imaging area 1, sub-imaging area 2,..., sub-imaging area N. The sub-imaging area is in the scanning The size of the field of view in the direction does not exceed 2°; the multiple sub-imaging areas can be evenly divided or non-uniformly divided; N is a positive integer, all satisfying the pr...
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[0065] Example 2
[0066] Provided is a non-isoplanar aberration correction device for adaptive optics line beam scanning imaging, which adopts the method of embodiment 1 to perform non-isoplanar aberration correction. In a more specific embodiment, the device includes an adaptive optical line beam scanning imaging device, a wavefront sensor, a wavefront controller, a wavefront corrector, and a computer;
[0067] The wavefront controller extracts the wavefront aberration measured by the wavefront sensor and feeds it back to control the wavefront corrector. The computer controls the wavefront controller in accordance with the method of embodiment 1 to complete the closed-loop correction and realization of non-isotropic zone aberration. Non-isoplanar aberration correction in online or offline mode.
[0068] Reference figure 2 In a preferred embodiment, the adaptive optics line beam scanning imaging device includes an imaging light source, a collection system, a first beam splitter, a...
Example Embodiment
[0073] Example 3 Comparison of the conventional correction method and the method of the present invention
[0074] Reference image 3 , Is the result of conventional single-shot adaptive optics aberration correction. Among them, the imaging field of view is 2 degrees (scanning direction) * 4 degrees (line beam direction). After a single aberration correction is performed on the entire imaging field of view, only the center 2*2 degrees belongs to the isotropic zone. This field of view aberration It is completely corrected, the field of view aberration on both sides is not completely corrected, and it is relatively fuzzy; the corresponding two sub-region wavefront aberration data (measured by Hartmann wavefront sensor) can also be seen, the aberration residual exceeds the requirement of the diffraction limit (λ / 14, λ=795nm).
[0075] Reference Figure 4 , Is the result obtained by the method of the present invention. Among them, the image deconvolution processing of the two sub-r...
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