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A kind of smelting method for preparing copper-phosphorus alloy by using copper-phosphorus master alloy

An intermediate alloy, copper-phosphorus alloy technology, applied in the field of smelting, can solve the problems of complex production process, volatile phosphorus, pollute the environment, etc., and achieve the effect of meeting chip production requirements, improving quality, and improving uniformity

Active Publication Date: 2022-06-14
NINGBO WEITECH VACUUM TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] CN102268567A discloses a preparation method of copper-phosphorus alloy, aiming at the defects of complex production process, high energy consumption and environmental pollution in the existing preparation method of copper-phosphorus alloy, it provides a method with simple process, uniform product composition and low energy consumption Preparation method of copper-phosphorus alloy with low pollution and no pollution in production process
However, in the process of smelting and casting of copper-phosphorus alloy, because the specific gravity of phosphorus is lighter than that of copper, and phosphorus is volatile, the content of phosphorus is easy to segregate.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0026] This embodiment provides a smelting method for preparing a copper-phosphorus alloy by using a copper-phosphorus master alloy. The smelting method includes: melting copper raw materials under vacuum conditions and first standing, then introducing nitrogen gas, and then adding copper-phosphorus Master alloy, tilted melting device, followed by a second stand and cast;

[0027] The melting is carried out under the vacuum degree P of 0.01Pa;

[0028] The first standing time is 30min; the end point of the protective gas is the gauge pressure P in the melting device T is -0.055MPa;

[0029] The mass percentage content of phosphorus in the copper-phosphorus master alloy is 14%; the inclined melting device is performed three times; the inclination angle of the melting device is 50°;

[0030] The second standing time was 32 min.

[0031] The obtained copper-phosphorus alloy has no phosphorus segregation, and the phosphorus content is 522+ / -40ppm.

Embodiment 2

[0033] The present embodiment provides a smelting method for preparing a copper-phosphorus alloy by using a copper-phosphorus master alloy. The smelting method includes: melting copper raw materials under vacuum conditions and first standing, then introducing argon gas, and then adding copper Phosphorus master alloy, tilting the melting device, followed by a second stand and casting;

[0034] The melting is carried out under the vacuum degree P of 0.005Pa;

[0035] The first standing time is 20min; the end point of the protective gas is the gauge pressure P in the melting device T is -0.07MPa;

[0036] The mass percentage of phosphorus in the copper-phosphorus master alloy is 14.3%; the inclined melting device is performed 4 times; the inclination angle of the melting device is 55°;

[0037] The second standing time was 25 min.

[0038] The obtained copper-phosphorus alloy has no phosphorus segregation, and the phosphorus content is 545+ / -50ppm.

Embodiment 3

[0040]This embodiment provides a smelting method for preparing a copper-phosphorus alloy by using a copper-phosphorus master alloy. The smelting method includes: melting copper raw materials under vacuum conditions and first standing, then introducing nitrogen gas, and then adding copper-phosphorus Master alloy, tilted melting device, followed by a second stand and cast;

[0041] The melting is carried out under the vacuum degree P of 0.015Pa;

[0042] The first standing time is 40min; the end point of the protective gas is the gauge pressure P in the melting device T is -0.04MPa;

[0043] The mass percentage content of phosphorus in the copper-phosphorus master alloy is 14.5%; the inclined melting device is performed three times; the inclination angle of the melting device is 45°;

[0044] The second standing time was 38 min.

[0045] The obtained copper-phosphorus alloy has no phosphorus segregation, and the phosphorus content is 535+ / -30ppm.

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Abstract

The invention relates to a smelting method for preparing copper-phosphorus alloys by using a copper-phosphorus intermediate alloy. The smelting method comprises: melting copper raw materials under vacuum conditions and first standing still, then introducing protective gas, and then adding copper-phosphorus intermediate alloy, tilting the melting unit, followed by a second rest and casting. The method provided by the invention solves the problem of phosphorus segregation in the preparation process of the copper-phosphorus alloy through the specific selection of the timing and conditions for adding the copper-phosphorus master alloy, and adopts an inclined method in the follow-up, utilizing the synergistic coupling effect between the two, and at the same time It also improves the uniformity of phosphorus in the copper-phosphorus ingot, controls the total phosphorus content, improves the quality of copper-phosphorus anode, and meets the requirements of chip production.

Description

technical field [0001] The invention relates to the field of smelting, in particular to a smelting method for preparing a copper-phosphorus alloy by using a copper-phosphorus intermediate alloy. Background technique [0002] At present, high-purity 4N (99.99%) copper-phosphorus alloy (phosphorus content 400-700ppm) is the raw material for manufacturing copper-phosphorus alloy anodes for semiconductors, mainly used for integrated circuit chip wiring, and is an indispensable raw material for high-quality chip production. [0003] CN102268567A discloses a preparation method of copper-phosphorus alloy, aiming at the defects of complex production process, high energy consumption and environmental pollution in the existing preparation method of copper-phosphorus alloy, a simple process, uniform product composition, and energy consumption are provided. The invention discloses a preparation method of copper-phosphorus alloy with low pollution and pollution-free production process. ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C22C1/03C22C9/00
CPCC22C1/03C22C9/00
Inventor 易骛文姚力军潘杰孙银祥
Owner NINGBO WEITECH VACUUM TECH CO LTD
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