Ultrasonic tunable spectral interferometry device and measurement method

A technology of interferometric measurement and measurement method, which is applied to measurement devices, optical devices, instruments, etc., can solve problems such as parasitic fringes, and achieve the effects of accurate phase interferogram, simplified measurement work, and high measurement accuracy.

Active Publication Date: 2022-03-08
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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Problems solved by technology

[0004] The purpose of the present invention is to solve the problem of parasitic fringes caused by multi-surface interference of high-parallel flat plate components, and to provide an ultrasonic adjustable spectral interferometry device and measurement method for the rapid measurement of front and rear surface shape errors of multi-surface high-parallel flat plate components

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  • Ultrasonic tunable spectral interferometry device and measurement method
  • Ultrasonic tunable spectral interferometry device and measurement method
  • Ultrasonic tunable spectral interferometry device and measurement method

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Embodiment Construction

[0027] The technical solution of the present invention will be further elaborated below in conjunction with the accompanying drawings.

[0028] Such as Figure 1 to Figure 2 As shown, the measurement device for ultrasonic tunable spectral interferometry of the present invention includes an ultra-broad spectrum laser light source 1, a circulator 3, an ultrasonic generator 4, a transducer 6, a fiber grating 7, an optical fiber fine-tuning frame 9, and a light trapping Device 10, beam expander output mirror 11, dichroic prism 12, CCD camera 15, collimator lens 13, transmission standard mirror 14, DUT 17 and reflection standard mirror 18.

[0029] The light beam along the ultra-broad spectrum laser light source 1 is transmitted through the optical fiber 2 and then coupled to the fiber grating 7 after passing through the circulator 3. The signal from the ultrasonic generator 4 is transmitted to the transducer 6 by the wire 5 to emit ultrasonic waves. The ultrasonic waves are transm...

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Abstract

A measuring device and method for ultrasonic tunable spectral interferometry. The measuring device includes an ultra-broad spectrum laser light source, a circulator, an ultrasonic generator, a transducer, an aluminum plate, a fiber Bragg grating, an optical fiber fine-tuning frame, a light trap, Beam expander output mirror, splitter prism, CCD camera, collimator lens, transmission standard mirror, DUT and standard mirror. The ultra-broad-spectrum laser light source produces a wide-spectrum beam. The ultrasonic generator and transducer are used to generate ultrasonic waves with adjustable frequency. The aluminum plate transmits ultrasonic waves to modulate the Bragg fiber grating. Separated from the grating reflected beam, a light trap is used to absorb the grating transmitted light, and a CCD camera is used to record the interferometric phase map. In the measurement process, the invention can realize the adjustment of the coherence length of the light source by adjusting the magnitude of the ultrasonic frequency, thereby realizing the fast and synchronous measurement of the surface shape error of the front and rear surfaces of the high-parallel flat plate element.

Description

technical field [0001] The invention relates to the field of ultrasonic interferometry, in particular to changing the coherence length by tuning the spectrum to realize the rapid and synchronous measurement of the front and rear surface shape errors of high parallelism flat plate components. Background technique [0002] With the rapid development of modern optical technology, modern optical systems have increasingly high requirements for the surface quality of optical components. High-quality surface optical components require high-precision detection technology to characterize. processing is also crucial. [0003] At present, the relatively mature detection methods include light interferometry measurement, microscopic interferometry measurement, light section measurement, light scattering measurement and optical stylus measurement. Among them, optical interferometry measurement is mainly based on point diffraction interferometry and Fizeau interferometer measurement. Alth...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/16G01B9/02015
CPCG01B11/161G01B9/02001
Inventor 刘世杰张徐周游白云波鲁棋徐天柱
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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