Carbon fiber bowl-shaped prefabricated body, carbon-carbon bowl body and crucible

Abstract

The invention provides a carbon fiber bowl-shaped prefabricated body which is a hollow bowl-shaped body, and the diameter of an upper end opening of the carbon fiber bowl-shaped prefabricated body islarger than that of a lower end opening of the carbon fiber bowl-shaped prefabricated body. Only local vulnerable parts need to be replaced, the whole crucible does not need to be scrapped, safe production is achieved, materials are saved, and the cost is reduced.

Description

technical field [0001] The invention relates to a thermal field device, in particular to a carbon fiber bowl-shaped prefabricated body in the manufacturing process of monocrystalline silicon or polycrystalline silicon, a carbon-carbon bowl made of it, and a crucible including the carbon-carbon bowl . Background technique [0002] In the manufacture of single crystal silicon, the Czochralski method (CZ method) is generally used at present, which is a method of pulling a single crystal from a melt along a vertical direction. In manufacturing equipment, one component is the graphite crucible, which is used to hold the quartz crucible inside. During use, due to the different expansion coefficients of the quartz crucible and the graphite crucible, and the corrosion reaction between silicon vapor and graphite, there are problems such as cracking of the graphite crucible and loss of strength due to erosion. Moreover, as the diameter of the crystal grown by monocrystalline silicon...

AI Technical Summary

Problems solved by technology

Due to the limitation of the strength of graphite crucible, the larger the diameter, the greater the wall thickness requirement, so the weight is very heavy, and the heat capacity is high, resulting in cumbersome operation, increased energy consumption, and increased cost.

[0003] The crucible in the prior art is an integral crucible, which is placed on the tray and then connected to the upper plate of the support rod. The crucible and the tray are separated, and the arc-shaped position at the bottom of the crucible is particularly easy to break and damage. Once broken, the entire crucible must be scrapped, the cost is high; moreover, the crucible and the tray are two parts, and the existence of the tray increases the cost

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