Method and device for array tubular anode assisted laser electrochemical composite processing based on variable electric field

An auxiliary laser and composite processing technology, applied in laser welding equipment, metal processing equipment, manufacturing tools, etc., can solve the problems of difficult to guarantee, extremely high positioning accuracy, and achieve the effect of low cost, improved processing efficiency, and high electric field strength

Active Publication Date: 2021-10-08
JIANGSU UNIV
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  • Abstract
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  • Claims
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Problems solved by technology

During the non-electrodeposition period, the device needs to shield the relative movement of the anode film plate and the cathode, and determine the relative displacement in the x and y directions according to the contour shape of the part. The positioning accuracy is extremely high and difficult to guarantee.

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  • Method and device for array tubular anode assisted laser electrochemical composite processing based on variable electric field
  • Method and device for array tubular anode assisted laser electrochemical composite processing based on variable electric field
  • Method and device for array tubular anode assisted laser electrochemical composite processing based on variable electric field

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Embodiment Construction

[0041] Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary and are intended to explain the present invention and should not be construed as limiting the present invention.

[0042] In describing the present invention, it is to be understood that the terms "central", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "axial", The orientation or positional relationship indicated by "radial", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description , rather than indicating or implying that the device or elem...

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Abstract

The invention discloses a method and device for array tubular anode assisted laser electrochemical composite processing based on variable electric field, and relates to the field of microprocessing in special processing technology. In the method of the present invention, an electrochemical circuit is formed between the tubular anode and the cathode substrate, the input voltage of a single tubular anode can be adjusted through a voltage regulation controller, the laser light enters the tubular anode distributed in the array through the liquid crystal mask plate, and the liquid crystal mask plate is controlled by a computer Display the grayscale image so that the outline of the laser reaching the processed deposition area is the same as the image on the liquid crystal mask plate. Due to the thermal effect and force effect of the laser in the laser irradiated micro-region, the rate of electrodeposition is greatly accelerated. The processing of the entire micro-component or the micro-structure of the array is realized by the array of tubular anodes. It is suitable for the processing of micro-components with complex continuous structures or array micro-structures, and is used in micro-machines, micro-electro-mechanical systems, metal templates, medical, electronics, aerospace and other micro-manufacturing fields.

Description

technical field [0001] The invention relates to the field of micromachining in special processing technology, in particular to a method for array tubular anode assisted laser electrochemical composite machining based on variable electric field, which is suitable for some microcomponents or array microfabrication with complex continuous structure. Structural processing. Background technique [0002] With the development of micro-electromechanical systems (MEMS), microfabrication technology for the manufacture of tiny and complex parts that can meet the specific functions and needs of MEMS has attracted much attention. Micro-electrodeposition processing technology has the advantages of high manufacturing precision, good process flexibility, and low cost, but its development and application are restricted due to defects such as slow deposition rate, poor deposition localization, and poor deposition quality. Laser electrochemical photoelectric composite deposition technology is...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B23H5/00B23K26/00
CPCB23H5/00B23K26/0093
Inventor 杨帅张朝阳吴予澄王银飞胡梦楠徐坤
Owner JIANGSU UNIV
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