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76results about How to "Change the electric field distribution" patented technology

Auxiliary anode mask micro electrolytic machining array micro-pit system and method

The invention provides an auxiliary anode mask micro electrolytic machining array micro-pit system and method, and belongs to the technical field of micro electrolytic machining. The system comprises an upper clamp (1), a lower clamp (7), a tool cathode (2) which is arranged on the upper clamp (1), a tool anode (6) which is arranged on the lower clamp (7), mask plates (5) which are arranged on the surface of the tool anode (6) and of group drilling structures, and auxiliary anodes (4) which are fixed on the lower clamp (7) and surround edges of the tool anode (6); an electrolyte flow pass is formed between the tool cathode (2) and the tool anode (6), and the system further comprises a main power supply (9) and an auxiliary power supply (8), wherein the positive pole of the main power supply (9) and the positive pole of the auxiliary power supple (8) are connected with the tool anode (6) and the auxiliary anode (4) respectively, and the negative pole of the main power supply (9) and the negative pole of the auxiliary power supple (8) are both connected with the tool cathode (2). The auxiliary anode mask micro electrolytic machining array micro-pit system and a method are characterized in that an auxiliary power supply voltage is smaller than a main power supply voltage, and a potential difference exists between the auxiliary power supply voltage and the main power supply voltage, so that the electric current density in all mask holes of the work piece surface is consistent, and the dimensional homogeneity of array micro-pits is improved.
Owner:NANJING UNIV OF AERONAUTICS & ASTRONAUTICS

Array substrate, preparation method and application thereof and performance improvement method

The invention provides an array substrate, a preparation method and an application thereof and a performance improvement method. The array substrate comprises a substrate, a shielding layer, a thin film transistor and a compensation layer, wherein the shielding layer is arranged on one surface of the substrate; the thin film transistor is arranged on the substrate and covers the shielding layer; and the compensation layer is arranged on one side, far from the substrate, of the thin film transistor and used for forming a second electric field in an active layer of the thin film transistor. Therefore, by changing the electric field distribution in the active layer of the thin film transistor, influence of the first electric field to the characteristic of the thin film transistor can be compensated, so that a technical effect of improving or eliminating an abnormal phenomenon of output characteristic curved saturation region warping can be realized, and current normal output can be ensured; and meanwhile, the adverse influence caused by change of a threshold voltage of the thin film transistor due to the first electric field can be improved and compensated, the problem of threshold voltage drifting and the like can be solved, and the thin film transistor can recover to the working state when the active layer is not influenced by the first electric field, and even a higher level.
Owner:BOE TECH GRP CO LTD

Trench-gate AlGaN/GaN HEMT device structure and manufacturing method

The invention discloses a composite gate floating field plate trench-gate AlGaN / GaN HEMT device structure and a manufacturing method thereof. The composite gate floating field plate trench-gate AlGaN / GaN HEMT device structure comprises a substrate, a GaN buffer layer, an AlN isolating layer, a GaN channel layer, an intrinsic AlGaN layer and an AlGaN doped layer which are sequentially compounded from bottom to top, wherein both ends on the AlGaN doped layer are respectively provided with a source and a drain, a LiF layer is arranged on the AlGaN doped layer at a position close to the drain, and a floating field plate is arranged on the LiF layer; an organic insulating dielectric layer is arranged between the LiF layer and the source, and a gate field plate is arranged on and beside the organic insulating dielectric layer; and a passivation layer is arranged in a bare area on the AlGaN doped layer. According to the trench-gate AlGaN / GaN HEMT device structure and the manufacturing method thereof, the breakdown voltage of a device is increased by utilizing the PTFE layer and the ITO gate field plate, the on resistance between the gate and the source of the device is decreased by utilizing the LiF layer and the Al floating field plate, and the breakdown voltage of the device is further increased by utilizing the gate field plate and the floating field plate.
Owner:XIDIAN UNIV

Depletion AlGaN/GaN MISHEMT high voltage device and manufacturing method thereof

The invention discloses a depletion AlGaN/GaN MISHEMT high voltage device and a manufacturing method thereof. The device sequentially comprises a substrate, a GaN buffer layer, an intrinsic AlGaN (or GaN) channel layer, an AlN isolated layer and an AlGaN barrier layer from bottom to top; the AlGaN barrier layer is provided with a source, a grid and a drain, and an insulating medium layer is arranged between the grid and the AlGaN barrier layer; a linear AlGaN layer, a P-type GaN (or InGaN) epitaxial layer and a base are sequentially extended on the AlGaN barrier layer between the grid and the drain. The depletion AlGaN/GaN MISHEMT high voltage device and the manufacturing method have the advantages that when the device is switched on, the concentration of 2-dimensional electron gas in a first area and a second area between the grid and the drain is increased, and resistance is reduced; when the device is switched off, the concentration of the 2-dimensional electron gas in the first area is reduced, the concentration of the 2-dimensional electron gas in the second area is the same as that when the device is switched on, the width of a depletion area of the device is increased, electric field distribution is changed, and the breakdown voltage of the device is improved; an insulated gate structure prevents the grid from leaking current, and the performance of the device is improved.
Owner:XIDIAN UNIV

Transverse high-voltage MOS device and manufacturing method thereof

The invention discloses a transverse high-voltage metal oxide semiconductor (MOS) device, which is formed by burying an inversion buried layer into a drifting region of the device. The invention also discloses a method for manufacturing the transverse high-voltage MOS device, which comprises the following steps of: forming a first conduction type buried layer, a first conduction type epitaxial layer and a sacrifice oxide layer on a silicon substrate, and determining an implantation position of the inversion buried layer in the drifting region by adopting a photoetching process; performing second conduction type foreign ion implantation by taking photoresist as a mask to form an inversion impurity region; manufacturing a field oxide layer, and activating and boosting inversion impurities simultaneously in the thermal process of growing the field oxide layer to form the shallow inversion buried layer in the drifting region; and forming a channel region, a source oxide layer, a drain oxide layer, a gate oxide layer and a gate. Electric-field distribution in the drifting region can be changed, a surface electric field of a device can be reduced and withstand voltage performance and reliability can be improved.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP

Composite drain-based AlGaN/GaN MIS-HEMT (Metal-Insulator-Semiconductor High-Electron-Mobility Transistor) high-voltage device and fabrication method thereof

The invention discloses a composite drain-based AlGaN/GaN MIS-HEMT (Metal-Insulator-Semiconductor High-Electron-Mobility Transistor) high-voltage device and a fabrication method thereof. The structure of the device comprises a substrate, a GaN buffer layer, an intrinsic GaN channel layer, an AlN isolating layer and an AlGaN barrier layer sequentially from the bottom up, a source, a grid and a composite drain are arranged on the AlGaN barrier layer, and an insulating medium layer is arranged between the grid and the AlGaN barrier layer; a linear AlGaN layer, a P-type GaN epitaxial layer and a base are sequentially epitaxially arranged on the top of the AlGaN barrier layer between the grid and the composite drain. The invention has the advantages that: when the device is switched on, the 2DEG (2-dimensional electron gas) concentration of a first region and a second region between the grid and the drain increases, and the resistance decreases; when the device is switched off, the 2DEG of the first region is reduced, the 2DEG of the second region is the same as when the device is switched on, the width of the depletion region of the device is increased, the distribution of an electric field is changed, and the breakdown voltage of the device is increased; the composite grid structure prevents the electric field peak from appearing at the edge of the drain, thus increasing the breakdown voltage of the device; an insulated grid structure prevents grid leakage current, and thereby the performance of the device is enhanced.
Owner:XIDIAN UNIV

MOSFET device with silicon carbide inverted T-shaped masking layer structure and preparation method thereof

The invention relates to an MOSFET device with a silicon carbide inverted T-shaped marking layer structure and a preparation method thereof. The MOSFET device comprises a gate dielectric layer, a base region, a masking layer, a drift layer, a substrate layer, a drain electrode, a polycrystalline silicon layer, a grid electrode, a first source region, a second source region and a source electrode, wherein the base region is located at two sides of the gate dielectric layer; the masking layer is located on the lower surface of the gate dielectric layer; the drift layer is located on the lower surfaces of the base region and the masking layer; the substrate layer is located on the lower surface of the drift layer; the drain electrode is located on the surface of the substrate layer; the polycrystalline silicon layer is located on the inner surface of the gate dielectric layer; the grid electrode is located on the upper surface of the polycrystalline silicon layer; the first source region is located on the upper surface of a part of the base region; the second source region is located on the upper surface of the rest of the base region; and the source electrode is located on the upper surfaces of the first source region and the second source region. According to the MOSFET device, the electric field distribution at the corner of the gate dielectric layer is changed through the P+ type masking layer at the bottom of the trench gate, the electric field concentration at the corner of the device is reduced, the breakdown voltage of the device is improved, and the reliability of the device is improved.
Owner:陕西半导体先导技术中心有限公司

Enhanced HEMT radio frequency device with gate-drain composite stepped field plate structure, and preparation method thereof

The invention relates to an enhanced HEMT radio frequency device with a gate-drain composite step field plate structure, and a preparation method thereof. A p-GaN region is arranged on the surface of a barrier layer, a gate is arranged on the p-GaN region, a gate step field plate is arranged on the side wall, facing a drain, of the p-GaN region, and a drain step field plate is arranged on the side wall, facing the p-type GaN region, of the drain. The step field plate comprises at least two sub-field plates, and the width of each sub-field plate is gradually reduced from top to bottom. Through the arrangement of the gate-drain composite step field plate, the electric field distribution of the side, close to the drain, of the gate and the electric field distribution of the side, close to the gate, of the drain are changed, the average electric field intensity between the gate and the drain is improved, and the voltage withstanding performance and reliability of the device are improved; and the p-GaN region is arranged below the gate, and the enhanced HEMT radio frequency device has smaller gate-drain capacitance and shows higher cut-off frequency in combination with the gate-drain composite step field plate structure.
Owner:SOUTH CHINA NORMAL UNIVERSITY

Field stop type insulated gate bipolar transistor and manufacturing method thereof

The invention relates to a field stop type insulated gate bipolar transistor and a manufacturing method of the field stop type insulated gate bipolar transistor. The manufacturing method of the field stop type insulated gate bipolar transistor sequentially comprises the following steps of (1) forming a buffer layer, wherein an N+ buffer layer is formed on the obverse side of a wafer; (2) forming an N-type device layer, wherein the N-type device layer is formed on the N+ buffer layer through epitaxial growth; (3) forming an IGBT structure, wherein an obverse side structure of the IGBT is formed on the N-type device layer; (4) forming a collector, wherein the collector is formed on the reverse side of the wafer. According to the manufacturing method of the field stop type insulated gate bipolar transistor, the ultra-thin field stop type insulated gate bipolar transistor can be manufactured without sheet processing equipment, the manufacturing method of the field stop type insulated gate bipolar transistor has the advantages of being simple in technology, high in efficiency and low in cost, and the field stop type insulated gate bipolar transistor manufactured through the manufacturing method of the field stop type insulated gate bipolar transistor has the lower conduction voltage drop and the lower application temperature.
Owner:CSMC TECH FAB1

AlGaN/GaN high-voltage device based on super junction leakage field plate and manufacturing method thereof

The invention discloses an AlGaN/GaN high-voltage device based on a super junction leakage field plate and a manufacturing method thereof. The high-voltage device structurally comprises a substrate, a GaN buffer layer, an intrinsic GaN (or AlGaN) channel layer, an A1N isolation layer and an A1GaN barrier layer from bottom to top. A source electrode, a grid electrode and a composite drain electrode are arranged on the A1GaN barrier layer. The composite drain electrode comprises a drain electrode and a drain electrode field plate. A linear A1GaN layer, a grid source field plate, a P-type GaN (or InGaN) layer and a base electrode are arranged between grid sources and between the grid leaks. The AlGaN/GaN high-voltage device based on the super junction leakage field plate has the advantages that the 2DEG concentration of a first area, the 2DEG concentration of a second area, and the 2DEG concentration of a third area are increased at the device breakover time, so that resistance is reduced, and device breakover resistance is reduced; the 2DEG concentration of the first area, the 2DEG concentration of the second area, and the 2DEG concentration of the third area at device cut-off time are the same as the 2DEG concentration of the first area, the 2DEG concentration of the second area, and the 2DEG concentration of the third area at the device breakover time, so that the width of an device exhausted area is increased, the distribution of an electric field is changed, and device breakdown voltage is increased; a composite drain electrode structure and a grid source field plate ensure that electric field peak value cannot occur at the edge of the drain electrode and the boundary of a source close to a grid, so that the breakdown voltage is increased.
Owner:XIDIAN UNIV

Super-junction-based AlGaN/GaN MIS-HEMT (Metal-Insulator-Semiconductor High-Electron-Mobility Transistor) high-voltage device and fabrication method thereof

The invention discloses a super-junction-based AlGaN/GaN MIS-HEMT (Metal-Insulator-Semiconductor High-Electron-Mobility Transistor) high-voltage device and a fabrication method thereof. The structure of the high-voltage device comprises a substrate, a GaN buffer layer, an intrinsic GaN (or AlGaN) channel layer, an AlN isolating layer and an AlGaN barrier layer sequentially from the bottom up, a source, a grid, a drain, a linear AlGaN layer, a grid-source field plate, a P-type GaN (or InGaN) layer and a base are arranged on the AlGaN barrier layer, and an insulating medium layer is also arranged between the grid and the AlGaN barrier layer. The invention has the advantages that: when the device is switched on, the 2DEG (2-dimensional electron gas) concentration of a first region, a second region and a fourth region increases, the resistance decreases, and thereby the purpose of decreasing the on resistance of the device is achieved; when the device is switched off, the 2DEG of the first region is reduced, the 2DEG of the second region and a third region is the same as that when the device is switched on, the width of the depletion region of the device is increased, and thereby the purpose of increasing the breakdown voltage of the device is achieved; the grid-source filed plate ensures that the electric field peak cannot appear at the boundary where the grid is close to the source, thus increasing the breakdown voltage; an insulated grid structure prevents grid leakage current, and thereby the performance of the device is enhanced.
Owner:XIDIAN UNIV

Array tubular anode assisted laser electrochemical combined machining method and device based on variable electric field

The invention discloses an array tubular anode assisted laser electrochemical combined machining method and device based on a variable electric field, and relates to the field of micromachining in a non-traditional machining technology. According to the method, an electrochemical loop is formed between tubular anodes and a cathode substrate, the input voltage of a single tubular anode can be adjusted through a voltage adjusting controller, laser penetrates through a liquid crystal mask plate to enter the tubular anodes distributed in an array mode, and a computer controls the liquid crystal mask plate to display a gray level image; the outline of the laser reaching the processing deposition area is the same as the image on the liquid crystal mask plate; in a laser irradiation micro-area, due to the heat effect and the force effect of laser, and the electro-deposition rate is greatly increased; and machining of the whole micro parts or array micro structures is achieved through the array of the tubular anodes. The method is suitable for machining of the micro parts or the array micro structures with complex continuous structures, and is applied to the machining fields of micro manufacturing of micro machinery, micro electro mechanical systems, metal forms, medical treatment, electronics, spaceflight and the like.
Owner:JIANGSU UNIV

Novel cavel combination gap

The invention discloses a novel cavel combination gap. The novel cavel combination gap comprises an H-shaped steel base, a first base sliding block, a second base sliding block, a third base sliding block, a cavel gap combination, an adjustable supporting column, a metal plate and a metal plate supporting seat. The first base sliding block, the second base sliding block and the third base sliding block are respectively embedded in the H-shaped steel base, and can slide along the H-shaped steel base; a first supporting column insulator is carried by the first base sliding block; the second base sliding block is used for supporting a second supporting column insulator; the metal plate is fixed to the second supporting column insulator through the metal plate supporting seat; the third base sliding block is used for carrying the adjustable supporting column; the cavel gap combination comprises a first insulator supporting column, a first cavel electrode arranged on the first insulator supporting column, the adjustable supporting column and a second cavel electrode arranged on the adjustable supporting column. Due to the implement of the novel cavel combination gap, the metal plate is additionally arranged between the cavel electrodes, and accordingly gap thunder and lightning withstand voltages of the gap under the same gap length condition can be increased and the power-frequency breakdown voltages of the gap can be reduced.
Owner:SHENZHEN POWER SUPPLY BUREAU +1

AlGaN/GaN heterojunction vertical type field effect transistor with P type shielding layer and manufacturing method of field effect transistor

The invention provides an AlGaN / GaN heterojunction vertical type field effect transistor with a P type shielding layer and a manufacturing method of the field effect transistor. The device is mainly characterized in that the P type shielding layer is adopted, and meanwhile, a current low-resistance conducting channel is formed by virtue of the two-dimensional electron gas and a special drift region of the AlGaN / GaN heterojunction. Due to the effect of the P type shielding layer, the concentration of the channel can be reduced to obtain a proper threshold voltage. When the device is switched off, the P type shielding layer effectively reduces the peak electric field in a gate dielectric layer, and the reliability of the device is improved; the two-dimensional electron gas introduces new charges, so that the electric field distribution in the device is changed, the breakdown voltage is improved, and meanwhile, the contradiction between the breakdown voltage and the drift region concentration is weakened. When the device is conducted, the current distribution of the traditional vertical type field effect transistor is changed due to the new conductive channel, so that the relatively low on resistance can be realized under the condition that the concentration of the drift region is relatively low.
Owner:XIDIAN UNIV

Special shielding device for routine test of arrester

The invention discloses a special shielding device for the routine test of a lightning arrester, which comprises a ring-shaped insulating plate, and the said ring-shaped insulating plates are two, namely a large ring plate and a small ring plate, and the diameters of the inner rings of the two are equal , the end faces of the large ring plate and the small ring plate are arranged parallel to each other and a supporting ring plate is arranged between them, and the large ring plate, the small ring plate and the supporting ring plate form an annular inner cavity, which can The insulator is clamped and fixed, and the inner ring surface of the large ring plate and the small ring plate is respectively provided with an insulating layer and a metal layer. The large ring plate, the small ring plate and the supporting ring plate are all split combined structures, respectively. Two split bodies are combined, and a guiding mechanism and a connecting mechanism are arranged between the two split bodies. The invention greatly improves the influence of external unfavorable factors on the data during the test, not only ensures the accuracy of the data, but also saves manpower, shortens the working time, greatly improves the working efficiency, and provides a guarantee for the safe operation of the power grid equipment .
Owner:STATE GRID CORP OF CHINA +1
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