Antioxidant mixed solution and FPC etching method for reducing under-film oxidation
An anti-oxidation, mixed-liquid technology, applied in chemical instruments and methods, compositions for inhibiting chemical changes, removal of conductive materials by chemical/electrolytic methods, etc., can solve material waste, increase production costs, and cannot remove 100% lines Oxidation and other problems, to achieve the effect of controlling production costs, inhibiting and eliminating free radicals, and reducing poor oxidation
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[0020] In order to further explain the technical solution of the present invention, the present invention will be described in detail below through specific examples.
[0021] The present invention comprises an anti-oxidation mixed solution, the solvent is water, and the volume ratio includes methanol (Methanol, CH 3 OH), 0.1% to 1% ferulic acid (Ferulicacid, C 10 h 10 o 4 ).
[0022] A preferred embodiment is that the volume ratio of methanol is 4.9%, and the volume of ferulic acid is 0.1%.
[0023] The present invention also comprises a kind of FPC etching method that reduces under-film oxidation, uses above-mentioned a kind of antioxidant solution, comprises the following steps:
[0024] Step 1. Use city water (tap water) to wash 1 time;
[0025] Step 2, use sulfuric acid and hydrogen peroxide to mix and micro-etch 3 times;
[0026] Step 3, use city water to wash 2 times;
[0027] Step 4, use antioxidant mixed solution to treat 1 pass;
[0028] Step 5, use city wate...
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