Device for continuous mask electrolytic machining of metal microstructure

Abstract

The invention discloses a device for continuous mask electrolytic machining of a metal microstructure. The device comprises a liquid spraying nozzle, an electrolytic power source, a workpiece positiveelectrode, a tool negative electrode, a gas spraying nozzle, a mask belt, a belt storage wheel, a belt recovery wheel, a driving source, a carrier roller and a tensioning wheel, wherein the mask beltwith a hollow pattern or seepage micropores is tightly pressed and attached to the surface of the tool negative electrode under the combined action of the belt recovery wheel, the tensioning wheel, the belt storage wheel and the like to form a wrap angle, and then is tightly pressed and attached to the to-be-machined surface of the rotatable or movable workpiece positive electrode; the belt recovery wheel continuously recovers the mask belt and drives the workpiece positive electrode and the tool negative electrode to do synchronous uniform motion; the liquid spraying nozzle sprays electrolyte at a high speed; and the workpiece positive electrode is subjected to uniform localized electrochemical dissolution alternately under the combined action of an electric field and a flow field untilthe workpiece is machined. The invention provides a new technology for continuous mask electrolytic machining of the metal microstructure, the process adaptability and stability of movable mask electrolytic machining can be improved, and a metal micro-nano structure with high precision and high surface quality is obtained.

Description

technical field [0001] The invention relates to a device for continuous mask electrolytic processing of metal microstructures, belonging to the field of mask electrolytic processing. Background technique [0002] With the development of high and new technologies such as aerospace, national defense industry, bioengineering and information engineering, manufacturing technology is facing the challenges of miniaturization of parts, structure precision and product miniaturization. Under this background, micro-nano manufacturing technology emerges as the times require. . Micro-nano-scale structures (abbreviation: micro-nano structures) are one of the main objects of micro-nano manufacturing. Metal micro-nano structures include metal micro-nano components and metal micro-nano features. Metal micro-nano components, such as micro-gears, comb-tooth drive electrodes, micro-probes, micro-shafts, etc., are often the core components of MEMS, precision machinery and instruments; metal mi...

AI Technical Summary

Problems solved by technology

[0006] Aiming at the deficiencies of the existing belt-type movable mask electrolytic processing, such as low adaptability, low process stability, and low precision and surface quality of the prepared metal micro-nano structure, the present invention proposes a continuous mask electrolytic process. Devices for processing micro-nano structures

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