A double-layer microporous chip, a preparation method for a double-layer microporous chip, and a biological device
A microporous layer and microporous technology, applied in the field of medical devices, can solve the problems of target cell loss, reduced screening efficiency, and reduced single cell capture efficiency, so as to improve the signal-to-noise ratio and screening ability, improve accuracy, and prevent The effect of clogging
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Embodiment 1
[0050] see figure 1 , is a schematic structural diagram of a double-layer microporous chip 100 provided by an embodiment of the present invention, including a first microporous structure layer 110 and a second microporous structure layer 120 connected to the first microporous structure layer 110 . The connection relationship among the various components will be described in detail below.
[0051] The first microporous structure layer 110 comprises several first layer micropores 111, the second microporous structure layer 120 comprises several second layer micropores 121, the aperture of the first layer micropores 111 and the The apertures of the second layer of micropores 121 are consistent, the apertures of the first layer of micropores 111 and the apertures of the second layer of micropores 121 are from small to large, and any one of the second layer of micropores 121 Have the shape and size to hold only one sample.
[0052] It can be understood that since the apertures of...
Embodiment 2
[0073] see image 3 , the present invention provides a flow chart of steps for the preparation method of the double-layer microporous chip, comprising the following steps:
[0074] Step S110: forming a metal seed layer on the substrate.
[0075] In some of these embodiments, the substrate is silicon or silicon nitride or silicon oxide.
[0076] In some of the embodiments, in the step of forming a metal seed layer on the substrate, specifically: using magnetron sputtering to sputter a layer of metal on the surface of the substrate, the metal being chromium, nickel or aluminum.
[0077] Step S120: Coating photoresist on the surface of the metal seed layer, and forming a first photoresist microporous layer on the photoresist to obtain the first microporous structure layer, the first microporous layer The porous structure layer includes several micropores in the first layer.
[0078] In some of these embodiments, a photoresist is coated on the surface of the metal seed layer, a...
Embodiment 3
[0089] see Figure 5, is a schematic structural diagram of a biological device provided in Embodiment 3 of the present invention, including an upper housing 310, the double-layer microporous chip 100 described in Embodiment 1 above, and a lower housing 320. The upper housing 310 and The lower casing 320 is fixedly installed, and the double-layer microporous chip 100 is fixed in the space formed by the upper casing 310 and the lower casing 320 .
[0090] In some of these embodiments, the upper casing 310 , the double-layer microporous chip 100 and the lower casing 320 are firmly bonded by magnetic sheets at four vertices.
[0091] The biological device provided in Example 3 of the present invention can be used for single cell capture, analysis and intercellular material transmission in in vitro diagnosis, which improves the accuracy of single cell analysis, thereby providing a new type of single cell real-time monitoring means.
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Abstract
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