Three-dimensional movable intelligent window based on vanadium dioxide film curly structure and preparation method of three-dimensional movable intelligent window
A vanadium dioxide and smart window technology, applied in the field of smart windows, can solve problems such as the bottleneck of sunlight modulation rate
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[0031] The preparation method and effect of the single-layer vanadium dioxide curled structure smart window will be described in detail below in conjunction with the accompanying drawings. The following examples are used to illustrate the present invention, but not to limit the content of the present invention.
[0032] "Fabrication of Smart Windows Based on Transparent Curled Vanadium Dioxide Thin Film Arrays"
[0033] (1) Take a 1 cm × 1 cm quartz plate as the substrate, ultrasonically clean it with acetone, ethanol, and deionized water for ten minutes, and dry it in a nitrogen stream.
[0034] (2) On the cleaned quartz wafer substrate, a vanadium dioxide film is deposited by magnetron sputtering. The magnetron sputtering equipment can adopt PVD75 type magnetron sputtering equipment produced by Kurt J. Lesker Company. The target material is a metal vanadium target, the RF power supply is 200W, the total sputtering time is 1200s, and the ratio of oxygen and argon is kept at...
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