Vertical cavity surface emitting laser device
A kind of equipment and laser cavity technology, applied in the field of high-speed vertical cavity surface emitting laser equipment, can solve the problems of increasing pulse rise time, limiting modulation signal bandwidth, inductance loss, etc., and achieve the effect of eliminating inductance, high speed and reducing manufacturing cost
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[0020] This disclosure describes a high speed VCSEL device in which both the anode surface mount contact and the cathode surface mount contact are located on the same side of the device, in particular on the opposite side of the VCSEL from which the output beam is emitted. The VCSEL structures described herein allow direct bonding (eg, by flip-chip bonding) of surface-mountable VCSELs to, eg, driver ICs. In this way, wire bond inductance and losses due to the use of microstrip connections can be eliminated. Furthermore, in cases where microstrip or stripline connections are used, the method described here can still eliminate wire bond inductance by bonding the VCSEL directly to the microstrip circuit.
[0021] Such as figure 1 As shown, a top emitting VCSEL device 100 includes a substrate 101 on which epitaxial layers for the VCSEL structure are grown, for example by metal organic chemical vapor deposition (MOCVD) or other deposition processes. The VCSEL laser cavity is form...
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