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A tin drop generating device

A technology for generating devices and tin droplets, which is applied to spray devices, spray devices, photolithography process exposure devices, etc., can solve the problems affecting the normal use of mainstream EUV lithography machines, cumbersome measurement and cleaning processes, etc. The effect of blocking, avoiding nozzle clogging, avoiding the accumulation of impurities

Active Publication Date: 2022-06-28
SHANGHAI INTEGRATED CIRCUIT EQUIP & MATERIALS IND INNOVATION CENT CO +1
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The regular measurement and cleaning process will affect the normal use of mainstream extreme ultraviolet lithography machines, and the measurement and cleaning process is cumbersome

Method used

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  • A tin drop generating device
  • A tin drop generating device
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Embodiment Construction

[0035] The specific embodiments of the present invention will be further described in detail below with reference to the accompanying drawings.

[0036] It should be noted that, in the following specific embodiments, when describing the embodiments of the present invention in detail, in order to clearly represent the structure of the present invention and facilitate the description, the structures in the accompanying drawings are not drawn according to the general scale, and the Partial enlargement, deformation and simplification of processing are shown, therefore, it should be avoided to interpret this as a limitation of the present invention.

[0037] In the following specific embodiments of the present invention, such as figure 2 As shown, it is a schematic structural diagram of the tin droplet generator of the present invention. Compared with the tin droplet generator in the prior art, a significant difference is that the overall structure is in an inverted state, that is...

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Abstract

The invention discloses a tin drop generating device, which comprises: an inverted tin drop generator body; a tin pool is arranged above the nozzle of the tin drop generator body, and the tin pool communicates with the nozzle; A heating coil is arranged on the pool to heat the tin in the tin pool to keep it in a molten state. The tin drop generating device of the present invention adopts an inverted structure design, which changes the spraying direction of the tin drop from bottom to top, and designs a tin pool structure in the nozzle part, so that the nozzle is protected by a thin layer of molten tin liquid surface, avoiding the nozzle Due to residual tin or accumulation of impurities.

Description

technical field [0001] The present invention relates to the technical field of integrated circuit manufacturing lithography equipment, in particular to a tin droplet generating device. Background technique [0002] At present, the mainstream extreme ultraviolet (Extremely Ultra-Violet, EUV) lithography machine adopts a laser-excited plasma (Laser Produced Plasma, LPP) light source, and the target material adopts tin (Sn). as attached figure 1 As shown, in the existing lithography machine, after the tin is heated to a molten state by the heating device in the tin droplet generator 2, the tin is sprayed down drop by drop. The pulsed laser beam emitted by the pulsed laser generator 1 (usually a carbon dioxide gas laser) is focused on the falling tin droplets through a focusing lens 3, and heated to a plasma state, thereby generating radiation including 13.5 nm extreme ultraviolet light. The spraying frequency of tin droplets is generally 50-200kHz, and the dropping speed of t...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G03F7/20B05B1/00B05B15/50
CPCG03F7/70033B05B1/00B05B15/50
Inventor 伍强李艳丽顾峥
Owner SHANGHAI INTEGRATED CIRCUIT EQUIP & MATERIALS IND INNOVATION CENT CO
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