On-chip terahertz source based on hyperbolic metamaterial and preparation method thereof

Abstract

The invention provides an on-chip terahertz source based on a hyperbolic metamaterial and a preparation method of the on-chip terahertz source; the hyperbolic metamaterial structure layer is formed bythe material of which the terahertz waveband is covered by the plasma frequency and the material which is dielectric in the terahertz waveband, and a slit grating is arranged on the first surface ofthe hyperbolic metamaterial structure layer; and an electron beam is arranged on the second surface of the hyperbolic metamaterial structure layer, so that the hyperbolic metamaterial structure layercan generate terahertz radiation, and the terahertz radiation in the free space is extracted through the slit grating. Terahertz radiation is generated by using the hyperbolic metamaterial structure layer, so that relatively wide terahertz radiation frequency spectrum, miniaturization of a terahertz source and on-chip integration can be realized; terahertz radiation is generated by the action between the hyperbolic metamaterial structure layer and an electromagnetic field formed by electrons in an electron beam, and continuous and stable output of the terahertz radiation can be realized underthe condition that the kinetic energy of the electrons in the electron beam is stable.

Description

technical field [0001] The invention relates to the field of vacuum electronics terahertz technology, in particular to an on-chip terahertz source based on hyperbolic metamaterials and a preparation method thereof. Background technique [0002] Terahertz (Terahertz, THz, 1THz=10 12 Hz) waves refer to electromagnetic waves with a frequency in the 0.1THz-10THz frequency band. Terahertz waves have strong penetration and can be used in the field of security detection. In addition, terahertz wave photons have low energy and good coherence. They also have great application value in the fields of non-destructive quality inspection, biological imaging and space optical communication. Terahertz technology is also considered to be one of the most important technologies in the future. . [0003] At present, the methods for generating THz radiation can be mainly divided into two types: optoelectronics and electronics. The frequency of terahertz radiation based on optoelectronics is ...

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Problems solved by technology

[0005] The present invention provides an on-chip terahertz source based on hyperbolic metamaterials and a preparation method thereof, which are used to solve the problem that the terahertz source in the prior art still has a large structure size and a narrow spectral range of the generated terahertz radiation. It is difficult to continue to stabilize the output, so as to realize the miniaturization and on-chip integration of terahertz source devices, and can continuously and stably output terahertz radiation with a wide spectrum coverage

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