Telecentric F-Theta scanning lens for blue laser processing
A scanning lens and laser processing technology, applied in optics, optical components, instruments, etc., can solve the problems of spatter, uneven depth of penetration, low light absorption efficiency, etc., and achieve the effect of improving processing accuracy
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[0020] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0021] Embodiment The technical scheme and working principle of the present invention are illustrated by the core optical system of an F-Theta blue light 450nm telecentric scanning lens with a viewing angle of 11° and an entrance pupil diameter of 30mm. The embodiment has exactly the same structure as the summary of the invention, and to avoid repetition, only key data are listed.
[0022] The schematic diagram of the optical system structure of the blue 450nm telecentric F-Theta scanning lens is as follows figure 1 As shown, in order to achieve the design target requirements, 6 optical glass lenses are used, and the lenses adopt the focal power distribution of "-++-++". Starting from the laser incident direction, it includes the first lens L1 with focal length f1, the second lens L2 with focal length f2, the third lens L3 with focal length ...
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