Magnetic suspension molecular pump stator temperature monitoring system and method based on resistance identification

Abstract

The invention discloses a magnetic suspension molecular pump stator temperature monitoring system and method based on resistance identification. The magnetic suspension molecular pump stator temperature monitoring system and method are used for monitoring the temperature of a magnetic suspension molecular pump stator system in real time, and a hardware part of the system comprises a DSP circuit, a motor information interface circuit, a magnetic bearing information interface circuit, an external interface circuit and a communication interface circuit. According to the system, the motor winding current, the motor winding voltage, the rotor position, the magnetic bearing winding current and the magnetic bearing winding voltage collected by a control system of a magnetic suspension molecular pump motor and a magnetic bearing can be utilized to obtain the stator resistance values of the motor and the magnetic bearing through an identification algorithm; and then according to the relationship between related materials and the temperature, the stator temperature of a magnetic suspension molecular pump is estimated, a traditional temperature sensor is not needed, the reliability of the molecular pump temperature monitoring system is improved, and the assembly process is simplified.

Description

technical field [0001] The invention relates to a stator temperature monitoring system and method of a magnetic levitation molecular pump based on resistance identification, which is used to realize the stator temperature monitoring and stator winding state monitoring of the magnetic levitation molecular pump. Background technique [0002] Compared with the traditional molecular pump system, the magnetic suspension molecular pump system adopts magnetic suspension bearings, the rotor has no friction, no lubricating oil pollution, active vibration control, higher vacuum degree, smaller vibration amplitude, and can be installed at any angle. , It has been widely used in high-end vacuum fields such as chip production, vacuum coating, and crystal manufacturing. The magnetic levitation molecular pump needs to operate in a high vacuum environment for a long time when it works. After the stator heats up, the pump body will be deformed and the system performance will decrease. Theref...

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Problems solved by technology

[0008] The technical problem to be solved by the present invention is: in view of the existing magnetic levitation molecular pump stator temperature monitoring method in the operation process, which relies on the feedback of temperature sensors, on the one hand, the arrangement of a large number of temperature sensors increases the difficulty of assembly and outgoing line of molecular pump stator components, and improves In order to solve the problem of material and assembly cost, on the other hand, if the temperature sensor fails, the system can no longer monitor and other problems, a maglev molecular pump stator temperature monitoring system and method based on resistance identification is proposed

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