Magnetic suspension molecular pump stator temperature monitoring system and method based on resistance identification

A monitoring system and magnetic levitation technology, which are applied to the components, pumps, and pump control of the pumping device for elastic fluids, can solve the problem of increasing the cost of materials and assembly, increasing the difficulty of assembling and outgoing the stator components of the molecular pump, and the system can no longer be used. Monitoring and other issues to achieve the effect of reducing material costs, simplifying the assembly process, and improving reliability

Active Publication Date: 2021-04-09
BEIHANG UNIV
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  • Application Information

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Problems solved by technology

[0008] The technical problem to be solved by the present invention is: in view of the existing magnetic levitation molecular pump stator temperature monitoring method in the operation process, which relies on the feedback of temperature sensors, on the one hand, the arrangement of a large number of temperature sensors increases the difficulty of assembl

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  • Magnetic suspension molecular pump stator temperature monitoring system and method based on resistance identification
  • Magnetic suspension molecular pump stator temperature monitoring system and method based on resistance identification
  • Magnetic suspension molecular pump stator temperature monitoring system and method based on resistance identification

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Embodiment Construction

[0035] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0036] Such as figure 1 As shown, the present invention is mainly composed of DSP circuit 1, motor information interface circuit 2, magnetic bearing information interface circuit 3, peripheral interface circuit 4 and communication interface circuit 5. The DSP circuit 1 is the core circuit of the system, and is connected with the motor information interface circuit 2 , the magnetic bearing information interface circuit 3 , the peripheral interface circuit 4 and the communication interface circuit 5 . During the operation of the temperature monitoring system, it communicates with the host computer in real time through the communication interface circuit, receives instructions from the host computer, and sends stator temperature information to the host computer at the same time. In addition, the system can also receive analog instructions and dig...

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Abstract

The invention discloses a magnetic suspension molecular pump stator temperature monitoring system and method based on resistance identification. The magnetic suspension molecular pump stator temperature monitoring system and method are used for monitoring the temperature of a magnetic suspension molecular pump stator system in real time, and a hardware part of the system comprises a DSP circuit, a motor information interface circuit, a magnetic bearing information interface circuit, an external interface circuit and a communication interface circuit. According to the system, the motor winding current, the motor winding voltage, the rotor position, the magnetic bearing winding current and the magnetic bearing winding voltage collected by a control system of a magnetic suspension molecular pump motor and a magnetic bearing can be utilized to obtain the stator resistance values of the motor and the magnetic bearing through an identification algorithm; and then according to the relationship between related materials and the temperature, the stator temperature of a magnetic suspension molecular pump is estimated, a traditional temperature sensor is not needed, the reliability of the molecular pump temperature monitoring system is improved, and the assembly process is simplified.

Description

technical field [0001] The invention relates to a stator temperature monitoring system and method of a magnetic levitation molecular pump based on resistance identification, which is used to realize the stator temperature monitoring and stator winding state monitoring of the magnetic levitation molecular pump. Background technique [0002] Compared with the traditional molecular pump system, the magnetic suspension molecular pump system adopts magnetic suspension bearings, the rotor has no friction, no lubricating oil pollution, active vibration control, higher vacuum degree, smaller vibration amplitude, and can be installed at any angle. , It has been widely used in high-end vacuum fields such as chip production, vacuum coating, and crystal manufacturing. The magnetic levitation molecular pump needs to operate in a high vacuum environment for a long time when it works. After the stator heats up, the pump body will be deformed and the system performance will decrease. Theref...

Claims

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Application Information

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IPC IPC(8): F04D19/04F04D27/00F04D29/00F04D29/058
CPCF04D19/048F04D27/001F04D29/002F04D29/058
Inventor 毛琨杨全耀郑世强王坤陈宝栋周冲
Owner BEIHANG UNIV
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