Cascaded bent waveguide type lithium niobate polarization rotator
A polarization rotator and bending waveguide technology, applied in the field of optical communication, can solve the problems of large size, reduction, and large inclination angle of the sidewall of the etched waveguide, such as an integrated polarization control device, etc. The effect of simplifying the process steps
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[0038]X-cut lithium niobate based on lithium niobate on silicon insulator (Lithium Niobate on Insulator, LNOI) is selected, the core layer is lithium niobate material, the thickness is 600nm, and the refractive index is (2.138 in x direction, 2,211 in y direction, z Direction 2,211); the thickness of the silicon dioxide buried layer is 1.445; the refractive index of the air upper cladding is 1; the thickness of the silicon substrate layer is 500 μm, and the refractive index is 3.476. The etching depth of the etched waveguide is 600nm, the inclination angle of the sidewall of the waveguide is 65 degrees, and the lithium niobate waveguide transmits the fundamental mode of mixed polarization of TE and TM.
[0039] The maximum bending radius of the Euler curved waveguides 121 and 222 with gradually changing width is 45 μm, the minimum bending radius is 5 μm, and the waveguide width gradually changes from 620 nm to 810 nm; the maximum bending radius of the Euler curved waveguides 12...
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