Permanent magnet type surface flow field sensor and sensor array
A sensor array and permanent magnet technology, which is applied in instrumentation, fluid velocity measurement, velocity/acceleration/shock measurement, etc., can solve problems such as the impossibility of surface mounting and extremely high requirements for sensor power consumption, size and weight.
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Embodiment 1
[0029] This embodiment provides a permanent magnet surface flow field sensor, such as figure 1 and figure 2 As shown, it includes an electrode 1 , a conductive base 2 , an insulating layer 3 , a substrate 4 and a magnet 5 . The electrode 1 is fixed on the conductive base 2, the conductive base 2 is fixed on the first part of the substrate 4, the insulating layer 3 is fixed on the second part of the substrate 4, and the magnet 5 Attached to the bottom surface of the substrate 4 .
[0030] Specifically, the electrode 1 is a silver electrode, a silver chloride electrode or a gold electrode, which is deposited on the surface of the conductive substrate 2 by electroless plating, and is used for direct contact with ionic conductive fluids such as water, sodium chloride solution, and seawater. The conductive substrate 2 is a copper foil substrate. Metal copper is deposited on the surface of the substrate 4 according to the required pattern by mask exposure pattern transfer method,...
Embodiment 2
[0034] This embodiment provides a permanent magnet surface flow field sensor array, such as figure 2 and image 3 As shown, it includes: a plurality of electrode groups, a plurality of common mode voltage suppression electrodes 10 , a conductive base 2 , an insulating layer 3 , a substrate 4 and a magnet 5 . The plurality of electrode groups are fixed on the first part of the conductive base 2; the insulating layer 3 is fixed on the second part of the conductive base 2, and the insulating layer 3 is on the first part of the conductive base 2 It is in a hollow state; the conductive base 2 is fixed on the substrate 4 , and the magnet 5 is attached to the bottom surface of the substrate 4 . Same as Embodiment 1, the substrate is a copper foil substrate, and metal copper is deposited on the surface of the substrate 4 according to the required pattern through the mask exposure pattern transfer method, forming a conductive circuit to transmit the electrical signal to the signal am...
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