Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Temperature sensor

A technology of temperature sensor and cantilever beam, which is applied in the field of sensors, can solve the problems of low sensitivity, large volume and high price

Active Publication Date: 2021-04-27
BEIJING SMARTCHIP MICROELECTRONICS TECH COMPANY +3
View PDF5 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Thermal resistance has good linearity in temperature measurement, but it is large in size, high in price and low in sensitivity
The thermistor has high sensitivity and small size, but the temperature measurement linearity is poor and the temperature measurement range is narrow
The disadvantages of traditional temperature sensors greatly limit its scope of application. Therefore, there is an urgent need for a temperature sensor with high sensitivity, high measurement accuracy, easy integration, and good stability.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Temperature sensor
  • Temperature sensor
  • Temperature sensor

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0022] The specific implementation manners of the embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings. It should be understood that the specific implementation manners described here are only used to illustrate and explain the embodiments of the present invention, and are not intended to limit the embodiments of the present invention.

[0023] An embodiment of the present invention provides a temperature sensor, the sensor includes: a substrate with a resonant cavity; a cantilever beam made of semiconductor material, located in the resonant cavity, with one end fixed on the substrate; a metal layer , located on the surface of the cantilever beam, when the temperature changes, it interacts with the cantilever beam to generate a static bending amount; the Wheatstone bridge includes at least one U-shaped variable piezoresistor, and the variable piezoresistor is located at the fixed part of the cantilever beam The po...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
thicknessaaaaaaaaaa
Login to View More

Abstract

The embodiment of the invention provides a temperature sensor, and belongs to the technical field of sensors. The temperature sensor includes a substrate, a cantilever beam, a metal layer and a Wheatstone bridge;a resonant cavity is formed in the substrate; the cantilever beam is positioned in the resonant cavity, and one end of the cantilever beam is fixed on the substrate; the metal layer is located on the surface of the cantilever beam, and when the temperature changes, the metal layer and the cantilever beam jointly act to generate a static bending amount; the Wheatstone bridge comprises at least one U-shaped variable piezoresistor; the variable piezoresistor is located at the maximum stress position of the fixed end of the cantilever beam and used for converting the static bending amount into an electric signal. Through the temperature sensor of the technical schemes provided by the invention, rapid, high-sensitivity and high-precision detection of the environment temperature can be realized.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to a temperature sensor. Background technique [0002] Temperature is an essential and important physical quantity in daily life. The detection of ambient temperature is of great significance in industry, agriculture and people's daily life. Temperature sensors are widely used in various occasions. Now the mainstream temperature sensors are: first, bimetallic thermometers, which consist of two or more metal sheets with different thermal expansion coefficients stacked to form a multilayer metal sheet. When the temperature changes, the multi-layer metal sheet undergoes stress and deformation, indicating the temperature in the form of a graduated scale. This type of temperature sensor is simple to manufacture and low in cost, but has a narrow temperature measurement range and low temperature measurement accuracy. Second, the thermocouple temperature sensor consists of two different c...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): G01K7/16
CPCG01K7/16
Inventor 赵东艳王于波张鹏张海峰陈燕宁王帅鹏王峥付振郭彦付登源朱银芳杨晋玲
Owner BEIJING SMARTCHIP MICROELECTRONICS TECH COMPANY
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com