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A system and method for quality inspection of the whole process of printing and manufacturing display devices

A technology for display devices and the whole process, applied in semiconductor/solid-state device manufacturing, instruments, printing, etc., can solve the problems of not involving liquid film detection scheme, adjustment, and no problem, and achieve the effect of easy defect analysis and accurate detection

Active Publication Date: 2022-04-08
HUAZHONG UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Some technical solutions related to defect detection in the inkjet printing process have been proposed in the prior art, but basically they all focus on a certain link for detection and have not formed Systematic comprehensive design does not fully consider the relationship between links, or the detection object and implementation technology are not perfect enough, so it is impossible to give a proper overall defect control plan from the entire inkjet printing process level
For example, the technical solution for glass substrate defect detection in the prior art focuses on the detection of the substrate itself but does not consider the impact of substrate defects on the quality of subsequent inkjet printing; the prior art only focuses on the positioning of the nozzle holes , but did not detect problems such as nozzle hole manufacturing defects and ink residue, and did not propose a solution to infer nozzle hole defects based on inkjet printing defects; Incomplete parameters, etc.
[0005] In addition, in the prior art, there are few detection schemes involving inkjet printing liquid film, and the detection of solidified film is generally carried out, and there is no liquid film detection scheme related to the definition of liquid film defects and defect detection algorithms.
For cured film detection, the existing online detection solutions generally cannot measure the accurate film thickness and volume only by taking photos with cameras. White light interference technology is currently only used in the offline measurement stage, and cannot measure information such as the thickness of liquid film and cured film online.
For the detection of liquid film and solidified film in the prior art, there is no solution to reduce defects by adjusting the front-end process through closed-loop control

Method used

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  • A system and method for quality inspection of the whole process of printing and manufacturing display devices

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Embodiment Construction

[0099] In order to make the objectives, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention, but not to limit the present invention.

[0100] figure 1 It is a schematic diagram of the composition of the overall system constructed according to the present invention for quality inspection of the whole process of jet printing and manufacturing of display devices. like figure 1 As shown, the system according to the present invention mainly includes a substrate detection module, a nozzle detection module, an ink drop detection module, a film thickness detection module and a control module.

[0101] First of all, for the substrate detection module, it includes a large-view down-view unit 12, a high-magnification down-view uni...

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Abstract

The invention belongs to the related field of inkjet printing manufacturing technology, and discloses a system for quality inspection of the whole process of inkjet printing manufacturing of display devices, which includes a substrate detection module, a nozzle hole detection module, an ink drop detection module, and a film thickness detection module And the control module, and through the design cooperation of these multiple modules, a series of operations such as empty substrate detection, nozzle hole detection, flying ink drop detection, liquid film detection and solidified film detection are realized. The invention also discloses a corresponding quality inspection method for the whole process of jet printing manufacturing of the display device. Through the present invention, it effectively makes up for the deficiency in the prior art that only detects a single link without considering the overall situation, realizes high-precision quality inspection of each link in the inkjet printing manufacturing process of the display device, and significantly improves the quality and quality of the display device product Rate.

Description

technical field [0001] The invention belongs to the related field of inkjet printing manufacturing technology, and more particularly, relates to a system and method for quality detection in the whole process of inkjet printing manufacturing of display devices. Background technique [0002] New display devices are developing in the direction of ultra-high resolution, large size, thinness, flexibility and low cost. The traditional display manufacturing technology based on vacuum coating has problems such as complex preparation process, high cost and high energy consumption. Inkjet and emerging electro-fluidic printing technology are the mainstream printing and display technologies. They are not only high-precision patterned manufacturing technologies, but also have significant features such as low cost, flexibility, and large-area production. Therefore, they are the future of the new display industry. One of the important development directions. [0003] One of the key issues...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B41J29/393B41J2/045B41J11/00G01D21/02
CPCB41J29/393B41J11/0095B41J2/0456B41J2/04588G01D21/02B05B12/082B05B12/084B41J2/2142B05B12/08G06T7/0004H01L21/67253B05D1/02
Inventor 陈建魁刘强强尹周平
Owner HUAZHONG UNIV OF SCI & TECH
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