Precise pressure regulating valve
A precision pressure and regulating valve technology, applied in valve details, multi-port valves, safety valves, etc., to solve problems such as poor balance speed and adjustment linearity, gas circuit pressure fluctuations, and large dead volume.
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[0019] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0020] The purpose of the present invention is to provide a precision pressure regulating valve to solve the above problems in the prior art, to stabilize the flow of carrier gas and improve the accuracy of experimental results.
[0021] In order to make the above objects, features and advantages of the present invention more comprehensible, the present invention will be further described in detail below in conjunction with the accompanying drawings and specifi...
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