Method for preparing submicron grating with halved period
A sub-micron, grating technology, applied in the fields of advanced manufacturing, optics, and microfabrication, can solve the problems of high cost, high technical requirements, halved cycle size, etc., and achieve the effects of easy availability, great application prospects, and high economic value.
Active Publication Date: 2021-05-11
LUDONG UNIVERSITY
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Problems solved by technology
[0005] The present invention can solve the problems of high cost and high technical requirements of the traditional grating preparation method, and more importantly, the present invention breaks the rule that the traditional grating replication technology can only perform 1:1 replication, and prepares a grating whose period size is halved. Grating
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[0021] Specific embodiments: a method for preparing a submicron grating whose period is halved, which is completed by the following steps:
[0022] S1: Preparation of PDMS soft template for submicron master grating, the steps are as follows:
[0023] S11: Mix the PDMS body material and curing agent in a beaker at a volume ratio of 10:1 and stir evenly, and let the mixture stand in the air for 1 hour to fully remove air bubbles;
[0024] S12: Pour the mixture without bubbles in S11 on the submicron master grating to be replicated, and make the mixture completely cover the submicron master grating, let it stand for 1 hour, and then place the whole on a 60°C hot plate to heat The mixed solution was solidified for 1 hour; after natural cooling to room temperature, the cured PDMS material was peeled off from the submicron master grating, and the PDMS soft template of the submicron master grating was obtained at this time;
[0025] S2: Preparation of thin film material on the subst...
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The invention discloses a method for preparing a submicron grating with a halved period, relates to the fields of optics, micromachining, advanced manufacturing and the like, solves the problem that only 1:1 grating replication can be carried out in the existing grating replication technology, and prepares a submicron sub-grating with a halved period by utilizing a submicron mother grating. The method comprises the following steps: firstly, preparing a PDMS soft template of a submicron mother grating, and preparing a material film to be used on a clean substrate; then tightly attaching the PDMS soft template of the submicron mother grating to the prepared material thin film, and integrally placing the PDMS soft template and the prepared material thin film on a heating plate to be heated for 5 minutes, wherein the heating temperature is higher than the glass-transition temperature of the used thin film material; and finally, taking down the substrate and the PDMS soft template from the heating plate, cooling to room temperature, and separating the substrate from the PDMS soft template, thereby preparing the submicron sub-grating with a halved period on the substrate. The method is suitable for the field of submicron grating preparation.
Description
technical field [0001] The invention relates to the fields of optics, microfabrication, advanced manufacturing and the like, in particular to a method for preparing a submicron grating whose period is halved. Background technique [0002] A grating is an optical element that can spatially modulate the amplitude or phase of an incident light wave, also known as a diffraction grating. As a kind of optical splitting device, grating has been widely used in integrated optical circuit, optical communication, optical computing, optical information processing, laser and other aspects after hundreds of years of development. [0003] The existing grating manufacturing technologies mainly include mechanical scribing technology, laser interference technology and grating replication technology. Mechanical scribing technology refers to destructively marking a series of parallel scratches on the substrate, which belongs to the amplitude type grating, and its diffraction efficiency is high...
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Login to View More IPC IPC(8): G02B5/18
CPCG02B5/1847
Inventor 张登英邢文强张立春赵风周李锦绣郭安琪
Owner LUDONG UNIVERSITY