Separation and release of laser-processed brittle material
A brittle material and laser processing technology, applied in laser welding equipment, metal processing equipment, manufacturing tools, etc., can solve problems such as cracking of the inner edge of the workpiece
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[0022] Referring now to the drawings, wherein like parts are represented by like numerals, Figure 1A and 1B The device 10 used in the prior art laser cutting method is schematically shown and is also used in the separation and release method of the present invention. In both the prior art method and the current method, a workpiece 12 made of a brittle material is exposed to a focused beam 14 of pulsed laser radiation. Focusing of the pulsed laser radiation beam 14 is indicated by converging rays 16A and 16B, representing boundary rays of the focused laser radiation beam. Pulsed laser radiation beam 14 is produced by pulsed laser radiation source 18 and has a wavelength that renders brittle materials transparent. The pulsed laser radiation beam 14 is a beam of repeating single laser pulses (only three shown here) or trains of repeating laser pulses. Each pulse or train of pulses creates a defect 20 in the workpiece.
[0023] Array 22 of defects 20 is created by translating ...
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