Interference mode suppression device and method for silicon micro-resonant accelerometer

Abstract

The invention discloses an interference mode suppression device and method for a silicon micro-resonant accelerometer. The structure of the accelerometer is disposed on a middle monocrystalline silicon piece of three layers of monocrystalline silicon, and the structure comprises a mass block, two resonators, four micro-lever amplification mechanisms, stress release mechanisms, a plurality of supporting beams, and a plurality of fixed bases; the two resonators are symmetrically arranged in the middle of the mass block along the x axis, and the micro-lever amplification mechanisms are located between the two resonators; one ends of the inner sides of the two resonators are respectively connected with the output ends of two micro-levers, the fulcrum ends of the two micro-levers connected with the same resonator are connected with the same stress release mechanism, the stress release mechanism is connected with the fixed bases, and the other ends of the resonators are also provided with the stress release mechanism; the micro-lever amplification mechanisms are connected with the mass block, the mass block is connected with the fixed bases through the supporting beams, and the fixed bases are connected with the fixed bases of the upper-layer monocrystalline silicon and the fixed bases of the lower-layer monocrystalline silicon. According to the device, the vibration resistance and impact resistance of the accelerometer are improved, and the temperature coefficient is reduced.

Description

technical field [0001] The invention belongs to the technical field of micro-inertial measurement in MEMS, in particular to an interference mode suppression device and method for a silicon micro-resonance accelerometer. Background technique [0002] Silicon micro accelerometer is a typical MEMS inertial sensor. Its research began in the early 1970s, and there are various forms such as capacitive, piezoelectric, piezoresistive, thermal convection, tunnel current and resonance. The unique feature of the silicon microresonant accelerometer is that its output signal is a frequency signal, and its quasi-digital output can be directly used in complex digital circuits, which has high anti-interference ability and stability, and eliminates the need for other types of acceleration In order to avoid the inconvenience of signal transmission, it is directly connected to the digital processor. At present, the research of resonant accelerometer by Draper Laboratory in the United States i...

AI Technical Summary

Problems solved by technology

Due to the large mass of the silicon microresonant accelerometer, there are still many interference modes near the operating frequency of the accelerometer, and the vibration characteristics are poor; at the same time, the stiffness of the overall structure in the thickness direction is small, and the warpage generated in the MEMS process and packaging engineering Large, so silicon microresonant accelerometer temperature characteristics are poor

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