MEMS micromirror, Michelson interference system and optical system

A technology of interference system and optical system, which is applied in the field of optical design of micro-electromechanical systems, can solve the problems of large size of interference platform, difficult operation process, and low adjustment accuracy, so as to simplify the structure of equipment, reduce the difficulty of assembly, and simplify the system structure Effect

Active Publication Date: 2021-05-28
无锡微文半导体科技有限公司
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Problems solved by technology

However, due to the non-uniform motion of the moving mirror, a laser is usually added to the optical system of the spectrometer to calibrate the movement trajectory of the moving mirror. Therefore, the size of the traditional interference platform is relatively large, and there are many devices that need to be assem

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  • MEMS micromirror, Michelson interference system and optical system
  • MEMS micromirror, Michelson interference system and optical system
  • MEMS micromirror, Michelson interference system and optical system

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[0035] Hereinafter, the present invention will be described in more detail with reference to the accompanying drawings. In the various figures, identical elements are indicated with similar reference numerals. For the sake of clarity, various parts in the drawings have not been drawn to scale. Also, some well-known parts may not be shown in the drawings.

[0036] In the following, many specific details of the present invention, such as structures, materials, dimensions, processes and techniques of components, are described for a clearer understanding of the present invention. However, the invention may be practiced without these specific details, as will be understood by those skilled in the art.

[0037] figure 1 A schematic diagram showing the optical system of the Fourier transform spectrometer based on the Michelson interference system, including the polychromatic light part (left) for detecting the sample and the monochromatic light part (right) for calibrating the mov...

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Abstract

The invention discloses an MEMS micromirror, and the MEMS micromirror comprises a substrate and a mirror surface structure, wherein the mirror surface is located on one side of the substrate, a gap is formed between the first surface of the mirror surface and the first surface of the substrate, incident light rays emitted by a light source irradiate on the second surface of the substrate, and the incident light rays irradiate on the second surface of the substrate. The first part of incident light is reflected by the second surface of the substrate to form first reflected light, the second part of incident light is reflected by the first surface of the mirror surface structure to form second reflected light, and the first reflected light and the second reflected light are coupled to form first interference light. According to the interference system, based on the characteristics of MEMS chip surface reflection and substrate surface reflection, an interference light path is formed by coupling light reflected by a non-moving substrate and light reflected by a moving mirror surface structure in an MEMS micromirror, the interference requirement of a Michelson system is met, the arrangement of a fixed mirror is reduced, the optical path assembly efficiency of the interference system is effectively improved, and the cost of the optical structure is greatly reduced.

Description

technical field [0001] The invention relates to the field of optical design of microelectromechanical systems, in particular to a MEMS micromirror, a Michelson interference system and an optical system. Background technique [0002] MEMS (Microelectro Mechanical Systems) devices are widely used in communication, micro-optical devices, display and other fields due to their excellent characteristics, such as for making micro-projectors, micro-spectrometers, optical tomography endoscopic Mirror imaging scanning, optical switching, optical attenuator, etc. [0003] The time-modulated Fourier transform spectrometer is an optical system based on the Michelson interference system. Currently, the most typical Michelson interference structure is composed of a moving mirror, a fixed mirror, and a beam splitting prism, and the moving mirror can use the MEMS device mentioned above. When the collimated incident light is split by the beam-splitting prism, it is respectively incident on t...

Claims

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Application Information

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IPC IPC(8): G02B26/08G01J3/45
CPCG02B26/0833G01J3/45
Inventor 薛原谢会开
Owner 无锡微文半导体科技有限公司
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