Bipolar high-voltage pulse power supply capable of generating uniform low-temperature plasma
A high-voltage pulse power supply and low-temperature plasma technology, applied in the field of plasma, can solve the problems of switching loss interference, poor reliability, and high requirements for switching synchronization, and achieve the effects of reducing electromagnetic interference, avoiding oscillation, and reducing the number
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[0018] The specific embodiments of the present invention will be further described below in conjunction with the accompanying drawings.
[0019] A bipolar high-voltage pulse power supply that generates uniform low-temperature plasma, such as figure 1 and 2 As shown, it includes rectification and filtering module, two resonant charging modules with the same circuit structure, double primary winding pulse transformer and control module. The charging module and the rectification and filtering module can use commercially available rectification units and filter units, such as figure 2 As shown in , the rectifier unit includes four rectifier diodes, thereby forming a rectifier bridge to rectify the alternating current, and the filter unit includes a filter capacitor C1, which is connected between the positive and negative outputs of the rectifier unit. The dual primary winding pulse transformer includes a first primary coil Lp1, a second primary coil Lp2 and a secondary coil Ls,...
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