Laser processing device and method suitable for AlN plates

Abstract

The invention discloses a laser processing device suitable for AlN plates. The laser processing device comprises a processing unit and a pickling unit, and the processing unit comprises a laser, a base body, a cover plate, quartz glass and a gas detector; and the pickling unit comprises a pickling bottle, a heater and a gas washing bottle. The invention further provides a laser processing method suitable for the AlN plates. The laser processing method comprises the steps that the plates to be processed is arranged in the base body, and the cover plate is assembled; parameters of the laser are set; then argon is introduced into an inner cavity of the base body; the laser is turned on, the laser emits a laser beam to the surfaces of the plates to be processed, and nanosecond laser irradiates the to-be-processed area to achieve metallization; hydrochloric acid is added into the pickling bottle, and heating is carried out; the to-be-processed plates are put into the pickling bottle to be soaked, so that a surface metal layer is removed; and through a modeling optimization method, according to the processing depth and the surface flatness of the AlN plates, the laser power is gradually reduced, the laser scanning speed and the light spot diameter are adjusted till the processing meets the design requirement, and the processed plates are cleaned.

Description

technical field [0001] The invention relates to the technical field of laser processing and its peripheral supporting facilities, in particular to a laser processing device and method suitable for AlN plates. Background technique [0002] With the development of laser devices, more and more workpieces are processed by laser. Laser processing has the advantages of high energy density, no cutting force, and the combination of control system can process various complex shapes and small heat-affected zone. It can process many superhard materials and brittle materials that cannot or are difficult to process by traditional processing, and the cost is much lower than other processing methods, and the economy is good. At the same time, in the production process, some laser processing requires gas to accelerate the reaction and improve processing efficiency, while others require gas protection to improve the processing quality of the workpiece and reduce the phenomenon of overburning...

AI Technical Summary

Problems solved by technology

[0004] After metallizing the AlN (aluminum nitride) sheet, it is necessary to remove its surface metal for the next laser processing, and the commonly used milling method will not only cause errors in secondary clamping, but also generate tool costs

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