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A metasurface sparse aperture lens

A technology of sparse aperture and metasurface, which is applied in the fields of lenses, instruments, optics, etc., can solve the problems of processing difficulty, increased processing time and material cost, and the inability of metasurface lenses to realize the production of large-aperture equipment, etc., to achieve small error and phase Accurate modulation and simple preparation

Active Publication Date: 2022-08-09
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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Problems solved by technology

However, with the increase of the area, the processing difficulty, processing time and material cost increase sharply, and the metasurface lens cannot realize the production of large-aperture devices.

Method used

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  • A metasurface sparse aperture lens
  • A metasurface sparse aperture lens
  • A metasurface sparse aperture lens

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Embodiment 1

[0025] See figure 1 As shown, the circular sparse aperture of the metasurface of the present invention is composed of a light-transmitting substrate and a metasurface microstructure unit. The light-transmitting base material is silicon dioxide, and the metasurface is the structural unit material, which is silicon. The metasurface microstructure units are in four concentric fan ring regions, forming sub-apertures of sparse apertures. The four fan rings are located in the same circle, and the radians and generatrix are equal, and the polar coordinate azimuth interval is equal. They are located in the center 0°, 90°, 180°, and 270° directions, respectively. The inner radius r1 of the fan ring is 50um, the outer radius r2 is 250um, and the opening angle is θ=30°.

[0026] The metasurface microstructure unit is a hollow rectangular array, the side length of the rectangular array is L=0.3 μm, the period P=0.4 μm, and the height of the rectangle is H=0.7 μm. The hollow figure in ...

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Abstract

An unconventional metasurface sparse aperture lens is composed of a light-transmitting substrate and a metasurface microstructure layer. The metasurface microstructure units are distributed in the four sector ring regions, constituting the sub-apertures of the sparse aperture. By controlling the parameters of the metasurface microstructure units, the focusing of incident light at a specific wavelength can be achieved. The metasurface structure phase modulation of the metasurface sparse aperture lens is accurate, and the phase modulation between ‑pi and pi can be realized, and the modulation interval is less than 0.3. And through the sparse aperture technology, resolution imaging beyond the sub-aperture size can be achieved, which significantly reduces the lens processing area, reduces the processing difficulty, and reduces the process cost. The invention has great application value in the microscopic imaging system.

Description

technical field [0001] The invention relates to an optical device, in particular to a metasurface sparse aperture lens. Background technique [0002] A metasurface is a special optical device that uses periodically arranged microstructures to modulate parameters such as phase, amplitude and polarization of incident light at the subwavelength scale, and can realize beam focusing, shaping, beam splitting, detection and other functions. It has the advantages of small size, light weight, high efficiency and easy integration. However, with the increase of the area, the processing difficulty, processing time and material cost increase sharply, and the metasurface lens cannot realize the fabrication of large-aperture devices. [0003] The sparse aperture technology is to increase the effective aperture of the optical element by arranging multiple sub-apertures, which can effectively reduce the processing area of ​​the optical element, thereby realizing the larger aperture of the m...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B3/00G02B1/00
CPCG02B3/0037G02B1/002
Inventor 胡敬佩董延更张冲曾爱军黄惠杰
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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