Microscopic optical system image quality compensation method and device
A technology of optical system and compensation device, which is applied in optics, microscopes, optical components, etc., can solve the problems of complex structure of compensation device, increase cost, increase lens outer diameter, volume and weight, etc., and achieve high supplementary adjustment accuracy, high Assembling accuracy and cost reduction effects
Pending Publication Date: 2021-07-02
GEOPTICS SEQUENCING EQUIP CO LTD
View PDF6 Cites 0 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
[0004] The image quality compensation technology of the existing patented technology mainly focuses on devices such as compliant micro-motion mechanisms and deformable mirrors. The structure of the compensation device is complex, and precision wire cutting and other processes are required for processing, which increases the cost and increases the outer diameter and volume of the lens. and weight, while the actuator is integrated inside the optical system and cannot be reused, which increases the development cost of the optical system
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment 1
[0039] This embodiment provides a micro-optical system image quality compensation device. The micro-optical system image quality compensation device is mainly used in gene sequencing, and the aberration that needs to be compensated for the gene sequencing micro-optical system is mainly astigmatism (Zernike's Z5 and Z6 terms), coma (Zernike's Z7 and Z8 terms) and spherical aberration (Zernike's Z9 term). The image quality compensation device of the microscopic optical system can be used to adjust the eccentric compensation and axial compensation of the inner lens of the objective lens, wherein the eccentric compensation is used to compensate astigmatism and coma, and the axial compensation is used to compensate spherical aberration to improve the imaging of the objective lens precision.
[0040] like figure 1 As shown, the image quality compensation device of the micro-optical system in this embodiment includes a fixed frame 10 , an objective lens 20 and an eccentric actuator ...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
Login to View More Abstract
The invention discloses a microscopic optical system image quality compensation method and device. The microscopic optical system image quality compensation device comprises a fixing frame, an objective lens and an eccentric actuator. The eccentric actuator is arranged outside the objective lens, so that the eccentric actuator can perform eccentric compensation adjustment on different objective lenses, the eccentric actuator can be repeatedly used, and the cost is reduced; and the eccentric actuator is arranged externally, the outer diameter, the size and the weight of the objective lens are not increased, miniaturization of the objective lens is facilitated, the objective lens has higher assembling precision, and meanwhile the external eccentric actuator is not limited by the objective lens and has higher supplementary adjusting precision.
Description
technical field [0001] The invention relates to the technical field of optical system image quality compensation, in particular to a microscopic optical system image quality compensation method and device. Background technique [0002] High-performance micro-optical systems are widely used in biomedicine, semiconductor testing, metrology and other fields. Taking the fluorescence micro-optical system of a gene sequencer in biomedicine as an example, with the continuous improvement of sequencing throughput, the fluorescence micro-optic system needs to have a larger field of view and higher resolution, and it needs to meet the requirements in the full field of view. Diffraction-limited wave aberration, high focal length, distortion, field curvature and other image quality requirements, and four-color or two-color fluorescence imaging of four bases is required to meet the requirements of a wide spectrum. Therefore, the micro-optical system for gene sequencing has the characteri...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Applications(China)
IPC IPC(8): G02B21/02G02B7/02G02B21/08
CPCG02B21/02G02B7/021G02B7/022G02B21/08
Inventor 赵磊莫成钢乔彦峰张鑫苗亮宋珊珊宫晨任博学王凌欣黄龙郝志旭
Owner GEOPTICS SEQUENCING EQUIP CO LTD