High-dielectric high-mechanical-strength glass ceramic sintered substrate and preparation method thereof
A technology for sintering substrates and glass ceramics, which is used in circuit substrate materials, electrical components, printed circuits, etc.
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[0052] SiO 2 -Al 2 o 3 -MgO-ZnO-B 2 o 3 Crystalline glass A (SiO 2 : 44% by weight, Al 2 o 3 : 29% by weight, MgO: 11% by weight, ZnO: 7% by weight, B 2 o 3 : 9% by weight), crystalline glass B (SiO 2 : 50% by weight, Al 2 o 3 : 20% by weight, MgO: 7% by weight, ZnO: 3% by weight, B 2 o 3 : 9% by weight), and ZrO with an average particle size of 1 μm or less 2 and CaCO 3 And SrTiO with an average particle size of 1 μm or less 3 Mix according to the composition in Table 1, and CaZrO with an average particle size of 0.7 μm is added to samples No.1 to 17 in Table 1. 3 .
[0053] Add organic adhesives, plasticizers, and toluene to the mixture, and make green ceramic tapes with a thickness of 300 μm by doctor blade method, and then laminate the green ceramic tapes in 5 pieces at 50 ° C and apply 100 kg / mm 2 Pressurized conditions for autoclaving. Then, the obtained laminate was subjected to debonding treatment at 700°C in an atmosphere containing water vapor / nitro...
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