Precise clearance control system and method based on pressure feedback

Abstract

The invention provides a precision clearance control system and method based on pressure feedback, which are used for making up machining clearance errors caused by the positioning precision of a motion platform in ultra-precision machining. The system comprises a vibration isolation base, a machining container, a pressure sensor, a motor, a rotating shaft, a machining tool, an objective table, a piezoelectric ceramic micro-displacement mechanism, a mechanical arm, a guide rail and a computer control system, wherein the computer control system is connected with the pressure sensor, the motor, the piezoelectric ceramic micro-displacement mechanism and the mechanical arm. According to the invention, pressure signals measured by the pressure sensor are collected and compared with theoretical pressure signals stored in the system to convert the pressure difference value into micro-displacement of piezoelectric ceramic, so that compensation for the positioning precision error of the mechanical arm is achieved; and an effective low-cost compensation means is provided for the poor machining effect caused by machining gap changes in ultra-precision machining.

Description

technical field [0001] The invention belongs to the field of advanced optical manufacturing and technology, in particular to a precision gap control system and method based on pressure feedback. Background technique [0002] With the rapid development of modern optics, semiconductor electronics, materials science and other disciplines, the development of ultra-precision processing technology and equipment is an indispensable part of advanced manufacturing technology to achieve nanometer or even sub-nanometer cutting-edge product manufacturing. The development of complex surface-shaped components with extremely small surface roughness and almost defect-free surfaces and sub-surfaces has become one of the main research directions in the field of advanced manufacturing. With the development of modern science and technology, cutting-edge research represented by laser and remote sensing has gradually increased the requirements for the surface shape, material, and precision of var...

AI Technical Summary

Problems solved by technology

[0004] This invention proposes a precision gap control system and method based on pressure feedback, which is used to solve the problems caused by positioning errors in the processing of existing ultra-precision machining equipment For the problem of inconstant machining gap, the present invention can compensate for small changes in the machining gap in the process of processing at a lower cost, improve the stability of the material removal function, and help to obtain an ideal Gaussian material removal function profile through precise regulation of the gap

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