Large-bandwidth temperature-insensitive sensor based on Mach-Zehnder interferometer

A technology of interferometer and sensor, which is applied in the direction of converting sensor output, instrument, and optical device to transmit sensing components, etc. It can solve the problems of small contact area of ​​the measured substance, reduce the resolution of the sensor, and not consider the temperature characteristics, etc., to achieve Reduce production cost, improve sensitivity, and reduce thermal noise

Pending Publication Date: 2021-07-16
ZHEJIANG UNIV
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

For the strip waveguide, the optical mode is basically distributed inside the waveguide, and the contact area with the measured substance is small, usually the sensitivity is low
In addition, these

Method used

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  • Large-bandwidth temperature-insensitive sensor based on Mach-Zehnder interferometer
  • Large-bandwidth temperature-insensitive sensor based on Mach-Zehnder interferometer
  • Large-bandwidth temperature-insensitive sensor based on Mach-Zehnder interferometer

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Embodiment

[0053] In the illustrated example, a silicon nanowire waveguide based on silicon on insulator (Silicon on Insulator, SOI) material is selected, its core layer is silicon material with a thickness of 220nm, the refractive index is 3.46, and the thermo-optic coefficient is 1.86×10 -4 ; The underlying substrate is a silicon dioxide insulating layer with a thickness of 2 μm, a refractive index of 1.45, and a thermo-optic coefficient of 1×10 -5 ; The upper cladding is water, the refractive index is 1.325, and the thermo-optic coefficient is -1.2×10 -4 . The TE mode is selected as the carrier of sensing information.

[0054] The 3dB power splitter 2 and the beam combiner 10 adopt a multi-mode interference structure, corresponding to a width of 4 μm and a length of 13.8 μm.

[0055] The input optical waveguide 1, the first wide strip waveguide 3, the narrow strip waveguide 5, the slot waveguide 7, the second wide strip waveguide 9, and the output optical waveguide 11 are all single...

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Abstract

The invention discloses a large-bandwidth temperature insensitive sensor based on a Mach-Zehnder interferometer. Light source signals are input through the input optical waveguide, the power is equally divided into two asymmetric Mach-Zehnder interference arms through a 3dB power divider, the two arms are composed of first wide-strip-shaped waveguides, narrow-strip-shaped waveguides and slot waveguides which are different in length and second wide-strip-shaped waveguides which are the same in length, and different waveguide structures are connected through conical waveguides. A light field passes through the waveguide structures from the two arms, then the phase is modulated, and then the light field is interfered to the output optical waveguide through the beam combiner. The waveguides of three structures are adopted to modulate the light field phases of the two arms of the Mach-Zehnder interferometer, the high sensitivity characteristic of the slot waveguide and the integration advantage of the planar optical waveguide are combined, and the light sensor which is insensitive to temperature in a large bandwidth range, high in refractive index sensitivity, adjustable in free spectral range, high in integration level and low in cost is achieved.

Description

technical field [0001] The invention belongs to the field of optoelectronic devices, in particular to a temperature-insensitive sensor with a large bandwidth based on a Mach-Zehnder interferometer. Background technique [0002] Optical sensors have the characteristics of small size, short response time, high sensitivity, anti-electromagnetic interference, etc., and are an important branch of sensors. Among them, integrated optical waveguide sensors have the advantages of mass production, multi-channel multiplexing, and high integration, and have attracted extensive attention and research in the fields of biomolecular detection, timely diagnosis, and environmental protection. When the measured physical quantity changes, its corresponding absorption, scattering, fluorescence and other characteristics change, thus causing the change of the effective refractive index of the optical mode in the waveguide. Photonic crystals, etc.) or interferometric (Fabry-Perot interferometer, S...

Claims

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Application Information

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IPC IPC(8): G01D5/353G02B6/12
CPCG01D5/35329G02B6/12004G02B2006/12159
Inventor 时尧成丁佐芹
Owner ZHEJIANG UNIV
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