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Grating processing method and equipment

A processing method and grating technology, applied in diffraction gratings, optics, optical components, etc., can solve the problems of influence, periodic oxide fringe influence, easy excitation of surface plasmons, etc., and achieve the effect of reducing processing time.

Pending Publication Date: 2021-08-03
WESTLAKE UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

High temperature will adversely affect the formation of periodic oxide stripes
At the same time, due to the inevitable defects on the metal surface, surface plasmons are easily excited
The polarization direction of surface plasmons is perpendicular to the oxide stripes, which further adversely affects the formation of oxide stripes

Method used

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  • Grating processing method and equipment
  • Grating processing method and equipment
  • Grating processing method and equipment

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Experimental program
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Embodiment Construction

[0053] The present invention will be further described below in conjunction with accompanying drawing:

[0054] like figure 1 As shown, a device using femtosecond laser-induced self-organization of oxidized stripes to form a grating structure. It includes a femtosecond laser transmitter, an optical half-wave plate 4, an optical analyzer 5, a vortex half-wave plate 6, a focusing lens 7, an industrial camera 8, a beam splitter 9, a polarization beam splitter 10 and a spot analyzer 11.

[0055] Among them, the femtosecond laser transmitter is used to provide femtosecond laser 3; the optical half-wave plate 4 and the optical analyzer 5 are matched to continuously change the energy of the laser to obtain the laser with the energy we need. The vortex half-wave plate 6 can adopt a zero-order vortex half-wave plate, which is used to convert linearly polarized laser light into vector light, and at the same time adjust the mode of the laser light to radial, angular or counterclockwise ...

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PUM

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Abstract

The invention discloses a grating processing method, which comprises the following steps of: irradiating the surface of a to-be-processed area of a grating substrate by using laser to promote the surface of the area to generate oxidation reaction to obtain grating stripes of which the stripe direction is parallel to the laser polarization direction, wherein the energy density of the laser irradiated on the surface of the to-be-processed area of the grating is lower than an ablation threshold value of the substance and is greater than or equal to an oxidation threshold value of the substance. The invention further discloses equipment for implementing the method. The zero-order vortex half-wave plate generates a structured light field, and sub-wavelength gratings in special shapes such as an annular shape, a radial shape and a vortex shape are generated by single-beam laser exposure on scale. In the preparation process, real-time monitoring of the stripe forming process is achieved through the scattering laser intensity.

Description

technical field [0001] The invention belongs to the field of femtosecond laser advanced micro-nano manufacturing, and in particular relates to a method and equipment for rapidly manufacturing gratings of special shapes such as radial, annular, and spiral. Background technique [0002] Gratings are one of the most important components in the development of modern optics. For a long time, people have been working hard to improve the grating design method and manufacturing process in order to obtain more precise grating devices that can meet the increasingly stringent scientific research and industrial manufacturing requirements. The key problem of grating manufacturing is the preparation of solid material surface microstructure. At present, most of the grating microstructures are produced by means of microelectronic etching processes, such as laser direct writing electron beam exposure, focused ion beam, etc., to process grooves on the surface of materials, or use periodic st...

Claims

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Application Information

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IPC IPC(8): G02B5/18
CPCG02B5/1847G02B5/1857
Inventor 耿娇石理平方啸国仇旻
Owner WESTLAKE UNIV