Diffusion welding method for molybdenum target material and back plate
A technology of diffusion welding and welding method, which is applied in the field of target material manufacturing, can solve problems such as poor welding, and achieve the effect of improving the welding combination rate
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Embodiment 1
[0049] This embodiment provides a method for diffusion welding of a molybdenum target and a back plate, the method comprising:
[0050] Carrying out turning end thread and stepped end thread on the welding surface of the molybdenum target, the pitch of the thread is 0.3*0.1mm;
[0051] Carrying out machining step concave groove processing on the backboard;
[0052] Perform ultrasonic cleaning on the welding surface of the molybdenum target, the temperature of the ultrasonic cleaning is 50°C, and the time is 30min;
[0053] Carry out vacuum drying after the ultrasonic cleaning, the pressure of the vacuum drying is not more than 0.01Pa, and the time is 30min;
[0054] Assembling the molybdenum target and the back plate, followed by sheath welding, degassing and hot isostatic welding;
[0055] The back plate is a copper alloy back plate, the degassing temperature is 450°C, the pressure is not higher than 0.002Pa, and the time is 5h;
[0056] The hot isostatic welding temperatu...
Embodiment 2
[0058] This embodiment provides a method for diffusion welding of a molybdenum target and a back plate, the method comprising:
[0059] Carry out turning end face thread and step end face thread treatment on the welding surface of the molybdenum target, the pitch of the thread is 0.6*0.2mm;
[0060] Carrying out machining step concave groove processing on the backboard;
[0061] Perform ultrasonic cleaning on the welding surface of the molybdenum target, the temperature of the ultrasonic cleaning is 80°C, and the time is 5min;
[0062] Carry out vacuum drying after the ultrasonic cleaning, the pressure of the vacuum drying is not more than 0.01Pa, and the time is 120min;
[0063] Assembling the molybdenum target and the back plate, followed by sheath welding, degassing and hot isostatic welding;
[0064] The back plate is a copper alloy back plate, the degassing temperature is 500°C, the pressure is not higher than 0.002Pa, and the time is 4.5h;
[0065] The hot isostatic w...
Embodiment 3
[0067] This embodiment provides a method for diffusion welding of a molybdenum target and a back plate, the method comprising:
[0068] The welding surface of the molybdenum target is processed by turning end thread and step end thread, and the pitch of the thread is 0.45*0.15mm;
[0069] Carrying out machining step concave groove processing on the backboard;
[0070] Perform ultrasonic cleaning on the welding surface of the molybdenum target, the temperature of the ultrasonic cleaning is 70°C, and the time is 10min;
[0071] Carry out vacuum drying after the ultrasonic cleaning, the pressure of the vacuum drying is not more than 0.01Pa, and the time is 120min;
[0072] Assembling the molybdenum target and the back plate, followed by sheath welding, degassing and hot isostatic welding;
[0073] The back plate is a copper alloy back plate, the degassing temperature is 400°C, the pressure is not higher than 0.002Pa, and the time is 4h;
[0074] The hot isostatic welding tempe...
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