Terahertz material micro-nano defect detection device and method based on multi-frequency point information fusion

A terahertz material and defect detection technology, which is applied in the field of terahertz material micro-nano defect detection devices, can solve the problems of lack of multi-band terahertz signal fusion function, inability to obtain material physical and chemical information, and poor detection accuracy of micro-nano defects. , to improve the far-field detection efficiency of evanescent signals, realize the detection and analysis of micro-nano defects, and facilitate integrated extraction.

Active Publication Date: 2021-08-20
THE 41ST INST OF CHINA ELECTRONICS TECH GRP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, most of the current scattering terahertz microscopic imagers are based on optical sources, which are limited by the test mechanism. The performance of optical sources is greatly affected by the environment, the terahertz signal energy is weak, and the signal-to-noise ratio is poor, which is difficult to meet the test requirements.
[0004] Chinese invention patent application 201810970798.0 discloses a scattering terahertz near-field microscope based on radio frequency electronics. It is not difficult to find that this invention only uses terahertz point-frequency continuous The Hertz signal fusion function cannot obtain more physical and chemical information of materials, and the loc

Method used

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  • Terahertz material micro-nano defect detection device and method based on multi-frequency point information fusion
  • Terahertz material micro-nano defect detection device and method based on multi-frequency point information fusion
  • Terahertz material micro-nano defect detection device and method based on multi-frequency point information fusion

Examples

Experimental program
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Example Embodiment

[0075] Example one

[0076] This embodiment provides a terahertz material microena defect detecting device based on multi-frequency point information fusion.

[0077] Tuthertz material microba defect detecting device based on multi-frequency point information fusion, including: microwave excitation source, terahertz transceiver module, mirror combination module, nano probe, oscillation signal source, lock amplifier, and host computer;

[0078] Microwave excitation sources for generating input signals of the input terahertz transceiver module, as well as mixing signals of the input phase amplifier;

[0079] The terahertz transceiver module is used to continuously radiate the terahertz wave and receive a disappeared signal from the nano-probe local domain.

[0080] The mirror combination module is configured to take a terahertz beam radiated by the terahertz transceiver module in the nanode tip, and reflect the nano-probe local domain enhancement and modulated disappeared signal bac...

Example Embodiment

[0109] Example 2

[0110] This embodiment provides a terahertz material microena defect detection method based on multi-frequency point information fusion.

[0111] The micro-tachz material microbial defect detection method based on multi-frequency point information fuses, using the above-described multi-band-based information fusion based on multi-band information fused, including:

[0112] Control the distance between the sample to be tested and between the probe, and make the three-dimensional console for nanometer movement;

[0113] The terahertz transceiver module continuously radiates the terahertz wave and receives the amplitude and phase information of a certain position of the sample to be tested by the lock phase amplification and high order demodulation;

[0114] The three-dimensional scan console controls the nanodetestall to the sample to be tested to obtain the amplitude matrix and phase matrix of the sample to be tested.

[0115] According to the amplitude matrix of...

Example Embodiment

[0153] Example three

[0154] This embodiment provides a terahertz material microena defect detection method based on multi-frequency point information fusion.

[0155] The micro-tachz material microbial defect detection method based on multi-frequency point information fuses, using the above-described multi-band-based information fusion based on multi-band information fused, including:

[0156] Get the amplitude matrix and phase matrix of the disappearance signal to be tested;

[0157] According to the amplitude matrix of the sample to be tested, the terahertz near-field imaging algorithm is used to obtain a terahertz near field image at this frequency;

[0158] A terahertz near-field image to be tested at a specific interval in the scan bandwidth is obtained, and the information fusion algorithm based on multi-information source is used, and the terahertz ultra-resolution of the sample to be tested is obtained based on the information fusion algorithm based on the multi-informat...

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Abstract

The invention provides a terahertz material micro-nano defect detection device and method based on multi-frequency point information fusion. The device comprises a microwave excitation source, a terahertz transceiver module, a mirror surface combination module, a nano probe, an oscillation signal source, a lock-in amplifier and an upper computer, the microwave excitation source is used for generating an input signal input into the terahertz transceiver module and a frequency mixing signal input into the lock-in amplifier; the terahertz transceiver module is used for continuously radiating terahertz waves and receiving an evanescent signal locally enhanced and modulated by the nanoprobe; the mirror surface combination module is used for tightly coupling terahertz wave beams radiated by the terahertz receiving and transmitting module at the tip of the nanoprobe and reflecting an evanescent signal which is locally enhanced and modulated by the nanoprobe back to the terahertz receiving and transmitting module; and the oscillation signal source is used for generating a first signal for controlling the nanoprobe and a second signal input into the lock-in amplifier.

Description

technical field [0001] The invention belongs to the technical field of terahertz testing, and in particular relates to a micro-nano defect detection device and method for terahertz materials based on multi-frequency point information fusion. Background technique [0002] The statements in this section merely provide background information related to the present invention and do not necessarily constitute prior art. [0003] Based on the application needs of material micro-nano defect detection, as an emerging micro-nano defect detection analyzer that can break through the diffraction limit, the resolution of the scattering terahertz microscopic imager is only related to the size of the micro-probe in the system, and is not affected by it. The restriction of the incident light wavelength is the most promising micro-nano defect detection analyzer at present. However, most of the current scattering terahertz microscopic imagers are based on optical sources, which are limited b...

Claims

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Application Information

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IPC IPC(8): G01N21/3586G01N21/01G06T7/00G06T5/50G06T3/40
CPCG01N21/3586G01N21/01G06T7/0002G06T5/50G06T3/4053G01N2021/0112G06T2207/20221
Inventor 梁晓林年夫顺姜万顺朱伟峰邓建钦
Owner THE 41ST INST OF CHINA ELECTRONICS TECH GRP
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