Terahertz material micro-nano defect detection device and method based on multi-frequency point information fusion

A terahertz material and defect detection technology, which is applied in the field of terahertz material micro-nano defect detection devices, can solve the problems of lack of multi-band terahertz signal fusion function, inability to obtain material physical and chemical information, and poor detection accuracy of micro-nano defects. , to improve the far-field detection efficiency of evanescent signals, realize the detection and analysis of micro-nano defects, and facilitate integrated extraction.
CN113281298AActive Publication Date: 2021-08-20THE 41ST INST OF CHINA ELECTRONICS TECH GRP
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
THE 41ST INST OF CHINA ELECTRONICS TECH GRP
Publication Date
2021-08-20

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Abstract

The invention provides a terahertz material micro-nano defect detection device and method based on multi-frequency point information fusion. The device comprises a microwave excitation source, a terahertz transceiver module, a mirror surface combination module, a nano probe, an oscillation signal source, a lock-in amplifier and an upper computer, the microwave excitation source is used for generating an input signal input into the terahertz transceiver module and a frequency mixing signal input into the lock-in amplifier; the terahertz transceiver module is used for continuously radiating terahertz waves and receiving an evanescent signal locally enhanced and modulated by the nanoprobe; the mirror surface combination module is used for tightly coupling terahertz wave beams radiated by the terahertz receiving and transmitting module at the tip of the nanoprobe and reflecting an evanescent signal which is locally enhanced and modulated by the nanoprobe back to the terahertz receiving and transmitting module; and the oscillation signal source is used for generating a first signal for controlling the nanoprobe and a second signal input into the lock-in amplifier.
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Description

technical field

[0001] The invention belongs to the technical field of terahertz testing, and in particular relates to a micro-nano defect detection device and method for terahertz materials based on multi-frequency point information fusion. Background technique

[0002] The statements in this section merely provide background information related to the present invention and do not necessarily constitute prior art.

[0003] Based on the application needs of material micro-nano defect detection, as an emerging micro-nano defect detection analyzer that can break through the diffraction limit, the resolution of the scattering terahertz microscopic imager is only related to the size of the micro-probe in the system, and is not affected by it. The restriction of the incident light wavelength is the most promising micro-nano defect detection analyzer at present. However, most of the current scattering terahertz microscopic imagers are based on optical sources, which are limited b...

Claims

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