Surface anti-oxidation coating, preparation method thereof and surface modified titanium alloy
An anti-oxidation coating, titanium alloy technology, applied in coating, metal material coating process, ion implantation plating, etc., can solve the problems of inability to inhibit oxygen diffusion and decline in oxidation resistance of titanium alloys, and achieve excellent oxidation resistance properties, improve antioxidant properties, promote synergistic effects
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Embodiment 1
[0051] Using TC4 titanium alloy, cut it into a substrate of Φ30mm×10mm, and use 80 mesh, 120 mesh, 240 mesh, 400 mesh, 600 mesh, 800 mesh, 1000 mesh, 2000 mesh, 3000 mesh and 5000 mesh SiC gold in sequence Sand the substrate sequentially with sandpaper until there are no visible scratches on its surface, then wash it with acetone and dry it for later use.
[0052] The above substrate was placed in a magnetron sputtering system for coating. The target material used in magnetron sputtering is MoSi 2 Compound target and Si target. MoSi 2 The purity of compound target is 99.95wt.%, the purity of Si target is 99.95wt.%, MoSi 2 Both the compound target and the Si target have a diameter of 101 mm and a thickness of 5 mm.
[0053] The background vacuum of the magnetron sputtering chamber is 5.0×10 -6 Torr. Before coating, in order to eliminate residual pollutants and native oxide layer on the surface of the substrate, it is necessary to perform bias cleaning on the substrate. T...
Embodiment 2
[0056] The difference from Embodiment 1 is that in the magnetron sputtering, the DC sputtering power of the Si target is 100W. Prepared Si / MoSi 2 The thickness of the composite coating is 1.49 μm.
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