A kind of surface anti-oxidation coating and preparation method thereof and surface modified titanium alloy
An anti-oxidation coating, titanium alloy technology, applied in the coating, metal material coating process, vacuum evaporation plating and other directions, can solve the problems of inability to inhibit oxygen diffusion, the oxidation resistance of titanium alloys decline, etc., to achieve excellent oxidation resistance performance, enhancing antioxidant properties, promoting synergistic effects
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Embodiment 1
[0051] Using TC4 titanium alloy, it was cut into a base of Φ30mm×10mm, and 80 mesh, 120 mesh, 240 mesh, 400 mesh, 600 mesh, 800 mesh, 1000 mesh, 2000 mesh, 3000 mesh and 5000 mesh SiC gold were used in sequence. The substrate was sequentially sanded with photographic sandpaper until there were no visible scratches on the surface, then washed with acetone and dried for later use.
[0052] The above-mentioned substrates were placed in a magnetron sputtering system for coating. The target material used in magnetron sputtering is MoSi 2 Compound targets and Si targets. MoSi 2 The purity of the compound target is 99.95wt.%, the purity of the Si target is 99.95wt.%, the MoSi target is 99.95wt.% 2 Both the compound target and the Si target have a diameter of 101 mm and a thickness of 5 mm.
[0053] The background vacuum of the magnetron sputtering chamber is 5.0×10 -6 Torr. Before coating, a bias cleaning of the substrate is required to remove residual contamination and native ...
Embodiment 2
[0056] The difference from Example 1 is that in the magnetron sputtering, the DC sputtering power of the Si target is 100W. Prepared Si / MoSi 2 The thickness of the composite coating is 1.49 μm.
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