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Preparation method and device for carbon nanotube transparent conductive film

A transparent conductive film, carbon nanotube technology, applied in the direction of ion implantation plating, metal material coating process, coating, etc., can solve the problems of complex process parameters, performance impact, unstable quality, etc.

Pending Publication Date: 2021-10-12
苏州研烯科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The aerosol direct synthesis method has a fast film production speed, avoids the preparation of CNTs dispersion, and improves the quality of the film. However, the process parameters are complicated, and the morphology and quality of CNTs are affected by the temperature of the chemical vapor deposition furnace and the carrier gas during the reaction process. Influenced by factors such as flow rate, the quality is unstable, which limits its large-scale application
[0005] The synthesis of CNTs by the arc discharge method has the advantages of good crystallinity and controllable process, but the CNTs prepared by the arc discharge method are generally in the form of flocculent or film, which requires secondary dispersion to obtain a transparent conductive film, and the performance is seriously affected.

Method used

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  • Preparation method and device for carbon nanotube transparent conductive film
  • Preparation method and device for carbon nanotube transparent conductive film
  • Preparation method and device for carbon nanotube transparent conductive film

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preparation example Construction

[0037] The invention provides a preparation method of a carbon nanotube transparent conductive film, comprising the following steps:

[0038] S1: thread the flexible substrate 1 according to the wiring diagram of the guide roller winding device 9 and the water-cooled coating roller 3, and tighten the tension;

[0039] S2: install the cathode graphite electrode 4002 and the anode graphite catalytic electrode 4003;

[0040] S3: Close the equipment doors of the unwinding chamber 2, the coating chamber 4, the post-processing chamber 7 and the winding chamber 8, and start vacuuming;

[0041] S4: Open the process gas flow pipeline 4004 and the deposition gas pipeline 4005;

[0042] S5: Open the gas in the post-processing chamber 7, and control the airflow velocity and ethanol content;

[0043] S6: connect the low-voltage DC power supply 6;

[0044] S7: Open the guide roller winding device 9, control the line speed according to the requirements, and monitor the resistance change i...

Embodiment 1

[0059] Step 1: Wear PET flexible substrate 1 with a width of 125um and a width of 550mm. The light transmittance of flexible substrate 1 is 92%. Rewinding of room 2;

[0060] Step 2: The cathode graphite electrode 4002 has a purity of 99.5%, and the anode graphite catalytic electrode 4003 uses high-purity graphite powder and high-purity iron powder isostatic graphite electrode. The ratio of high-purity graphite powder and high-purity iron powder is 20 / 1, and it is installed on the electrode base 4001 Above, the distance between cathode and anode electrodes is 3mm, the control distance accuracy is ±0.1mm, the distance between two adjacent electrodes is 5mm, 56 pieces are installed, and the installation width is 605mm;

[0061] Step 3: Close the doors of each equipment and start vacuuming until the vacuum degree of the coating chamber 4 is 2.3×10 -6 mbar;

[0062] Step 4: Open the process gas flow pipeline 4004 and the deposition gas pipeline 4005, feed a mixed gas of H2 and A...

Embodiment 2

[0068] Step 1: Put PET with a width of 125um and a width of 1050mm, and the light transmittance of flexible substrate 1 is 92%. Rewinding of room 2;

[0069] Step 2: The cathode graphite electrode 4002 has a purity of 99.5%, and the anode graphite catalytic electrode 4003 uses high-purity graphite powder and high-purity iron powder isostatic graphite electrode. The ratio of high-purity graphite powder and high-purity iron powder is 20 / 1, and it is installed on the electrode base 4001 Above, the distance between cathode and anode electrodes is 3mm, the control distance accuracy is ±0.1mm, the distance between two adjacent electrodes is 5mm, 100 pieces are installed, and the installation width is 1089mm;

[0070] Step 3: Close the doors of each equipment and start vacuuming until the vacuum degree of the coating chamber 4 is 2.3×10 -6 mbar;

[0071] Step 4: Open the process gas flow pipeline 4004 and the deposition gas pipeline 4005, feed a mixed gas of H2 and Ar at a ratio of...

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Abstract

The invention discloses a preparation method and device for a carbon nanotube transparent conductive film. The preparation method comprises the steps that a flexible base material is threaded according to a wiring diagram of a guide roller winding device and a water-cooling film coating roller, a cathode graphite electrode and an anode graphite catalytic electrode are installed, all equipment doors are closed, vacuumizing is started, a process airflow pipeline and a deposition gas pipeline are opened, gases in a post-processing chamber are opened, a low-voltage direct-current power supply is switched on, the guide roller winding device is turned on, the linear speed is controlled according to requirements, the resistance change is monitored in real time through an online resistance detector, and the surface resistance of the carbon nanotube transparent conductive film prepared through the method is 110-530 omega / sq, the light transmittance is 94.3-98.1%, and the resistance uniformity is + / -10%. The preparation method is different from a reported floating catalysis method for preparing the carbon nanotube transparent conductive film, the preparation method has obvious advantages in the aspects of process control, stability, consistency and the like, and the high-quality carbon nanotube transparent conductive film can be obtained by adjusting parameters of the distance between the anode and the cathode, the anode formula, the airflow speed and the like.

Description

technical field [0001] The invention relates to the field of transparent conduction, in particular to a preparation method and device for a carbon nanotube transparent conduction film. Background technique [0002] Transparent conductive film (TCF) is widely used in smartphones, tablet computers and other portable electronic tools. Compared with traditional ITO transparent conductive film, carbon nano-based transparent conductive film has outstanding chemical stability and good substrate adhesion , Excellent mechanical flexibility, occupy an important position in the field of flexible display, but due to the limitation factors such as carbon nanomaterial synthesis technology and film forming technology, the light transmittance and resistance of this kind of conductive film still cannot meet the industry requirements. [0003] The preparation methods of carbon nanotube transparent conductive film (CNTs-TCF) are mainly divided into wet method and dry method. The wet process i...

Claims

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Application Information

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IPC IPC(8): C23C14/06C23C14/32C23C14/54C23C14/56
CPCC23C14/0605C23C14/562C23C14/545C23C14/325C23C14/541
Inventor 沈文晴其他发明人请求不公开姓名
Owner 苏州研烯科技有限公司