Flexible pressure sensor based on multilayer composite film and preparation method thereof

Abstract

The invention discloses a flexible pressure sensor based on a multilayer composite film and a preparation method thereof. The sensor comprises a substrate layer, an electrode layer, a pressure sensitive layer and a top protection layer. The pressure sensitive layer is a porous MXene / reduced graphene oxide nanosheet multi-layer composite film and comprises a first layer of reduced graphene oxide film, a porous MXene film layer and a second layer of reduced graphene oxide film from top to bottom. The microcosmic material structure of each sensitive layer is a loose porous structure, and has excellent sensitivity to compression strain and extremely low detection limit. The multi-layer composite structure enables the sensor to have a large detection range. The flexible sensor disclosed by the invention can realize detection of extremely low pressure, and is high in sensitivity, simple and feasible in preparation method and high in feasibility.

Description

technical field [0001] The invention relates to a flexible pressure sensor, in particular to a high-sensitivity flexible pressure sensor and a preparation method thereof. Background technique [0002] Wearable electronic devices have high flexibility and sensitivity, and have a wide range of applications in the fields of robotics, prosthetics, medical health, and human-computer interaction, which has aroused extensive research interests of researchers. Traditional pressure sensors are generally composed of semiconductor silicon materials, which have poor flexibility and ductility. Due to their poor wearability and comfort, their applications in wearable and curved surfaces are limited. How to prepare flexible pressure sensors with good performance is of great significance to the development of wearable devices. [0003] With the first report of the successful preparation of graphene in the laboratory in 2004, more and more low-dimensional nanomaterials are approaching the s...

AI Technical Summary

Problems solved by technology

However, MXene also has the disadvantages of two-dimensional materials, especially the strong overlapping tendency and the lack of closed porous structure.

At the same time, the titanium (Ti) atoms contained in MXene are easily oxidized, which makes the material lose its conductivity and greatly limits the service life of the fabricated device.

Images