A CSPBCL for omnidirectional imaging 3 Spherical ultraviolet detector and its preparation method
An ultraviolet detector, an all-round technology, applied in semiconductor/solid-state device manufacturing, electric solid-state devices, semiconductor devices, etc., can solve the problem of limited field of view, large detector volume and power consumption, and increase the ultraviolet omni-directional detection and imaging system Problems such as volume and power consumption, to achieve high repeatability, promote application, and controllable preparation methods
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Embodiment 1
[0049] (8) Peeling the flexible device from the polyimide tape.
[0051] (10) Lead and package the spherical ultraviolet imaging device.
Embodiment 2
[0060] (8) Peeling the flexible device from the polyimide tape.
[0062] (10) Lead and package the spherical ultraviolet imaging device.
Embodiment 3
In PbCl that does not participate in the reaction with CsCl
2
, since their existence will not affect UV imaging, no treatment is required;
(7) utilize laser etching technology to etch part of the flexible substrate in the sample obtained in step (6) (while this
The treatment can not destroy the warp metal electrode array and the zonal metal electrode array, so as to ensure the warp metal electrode array and the zonal gold electrode array.
the integrity of the metal electrode array) to obtain a structure consistent with the planarization decomposition scheme of the 3D sphere.
[0071] (8) Peeling the flexible device from the polyimide tape.
(9) use PDMS to transfer the flexible device array to the prefabricated spherical substrate for splicing, which can be preliminarily completed
Fabrication of spherical conformal UV detection device arrays.
[0073] (10) Lead and package the spherical ultraviolet imaging device.
[0074] The above-mentioned embodiments are only exam...
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Abstract
Description
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