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A CSPBCL for omnidirectional imaging 3 Spherical ultraviolet detector and its preparation method

An ultraviolet detector, an all-round technology, applied in semiconductor/solid-state device manufacturing, electric solid-state devices, semiconductor devices, etc., can solve the problem of limited field of view, large detector volume and power consumption, and increase the ultraviolet omni-directional detection and imaging system Problems such as volume and power consumption, to achieve high repeatability, promote application, and controllable preparation methods

Active Publication Date: 2022-05-31
HUAZHONG UNIV OF SCI & TECH +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the above two detectors have the following problems: filters are required for work, which will inevitably limit the field of view; refrigeration is required for work, resulting in very large detector volume and power consumption
[0003] In ultraviolet detection, ultraviolet imaging has become the main and priority development direction. However, to realize omni-directional and large-scale detection and imaging based on traditional planar imaging devices, theoretically it is necessary to use a combination of four or six detectors, or use multi-degree-of-freedom rotation The combination of motor and single detector will undoubtedly increase the size and power consumption of the ultraviolet omnidirectional detection and imaging system

Method used

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  • A CSPBCL for omnidirectional imaging  <sub>3</sub> Spherical ultraviolet detector and its preparation method
  • A CSPBCL for omnidirectional imaging  <sub>3</sub> Spherical ultraviolet detector and its preparation method
  • A CSPBCL for omnidirectional imaging  <sub>3</sub> Spherical ultraviolet detector and its preparation method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0049] (8) Peeling the flexible device from the polyimide tape.

[0051] (10) Lead and package the spherical ultraviolet imaging device.

Embodiment 2

[0060] (8) Peeling the flexible device from the polyimide tape.

[0062] (10) Lead and package the spherical ultraviolet imaging device.

Embodiment 3

In PbCl that does not participate in the reaction with CsCl

2

, since their existence will not affect UV imaging, no treatment is required;

(7) utilize laser etching technology to etch part of the flexible substrate in the sample obtained in step (6) (while this

The treatment can not destroy the warp metal electrode array and the zonal metal electrode array, so as to ensure the warp metal electrode array and the zonal gold electrode array.

the integrity of the metal electrode array) to obtain a structure consistent with the planarization decomposition scheme of the 3D sphere.

[0071] (8) Peeling the flexible device from the polyimide tape.

(9) use PDMS to transfer the flexible device array to the prefabricated spherical substrate for splicing, which can be preliminarily completed

Fabrication of spherical conformal UV detection device arrays.

[0073] (10) Lead and package the spherical ultraviolet imaging device.

[0074] The above-mentioned embodiments are only exam...

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Abstract

The invention belongs to the field of micro-nano manufacturing and optoelectronic devices, and discloses a CsPbCl with omnidirectional imaging 3 Spherical ultraviolet detector and its preparation method, the spherical ultraviolet detector includes a spherical substrate, a flexible substrate, a meridional metal electrode array, a latitudinal metal electrode array and patterned CsPbCl 3 Perovskite films, patterned by the CsPbCl 3 The distribution of the perovskite film array on the spherical surface of the spherical substrate and the use of the meridional metal electrode array and the latitudinal metal electrode array can realize spherical imaging of ultraviolet detection. By improving the structure of the device and the preparation process, the obtained spherical ultraviolet detector can simultaneously meet the advantages of omnidirectional detection and large field of view imaging, and greatly promotes the development and application of spherical imaging devices and optoelectronic devices.

Description

An omnidirectional imaging CsPbCl 3 Spherical UV detector and preparation method thereof technical field The invention belongs to the field of micro-nano manufacturing and optoelectronic devices, more specifically, relate to a kind of omnidirectional imaging CsPbCl 3 Spherical ultraviolet detector and preparation method thereof. Background technique [0002] Ultraviolet photodetectors are used in military fields such as missile approach warning, ultraviolet imaging guidance, and corona detection and Flame detection and other civil fields have great application value, and have become another extremely important addition to laser detection and infrared detection. The advanced photoelectric detection technology is listed as a key topic of current research and development by countries all over the world. Existing UV photodetectors include Vacuum UV detectors and solid-state UV detectors. However, the above two detectors have the following problems: the work requi...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L51/42H01L51/44H01L51/48C23C14/04C23C14/06C23C14/08C23C14/20C23C14/26C23C14/30C23C14/35
CPCC23C14/042C23C14/26C23C14/30C23C14/20C23C14/35C23C14/081C23C14/0694H10K71/16H10K71/80H10K30/10H10K77/111H10K30/81Y02E10/549
Inventor 廖广兰张许宁刘智勇孙博刘星月叶海波
Owner HUAZHONG UNIV OF SCI & TECH
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