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Trace atmosphere sampling detection device and trace atmosphere sampling detection method

The technology of a detection device and a test device, which is applied in the field of electronic information, can solve the problems such as the inability to fully convey the internal atmosphere, and achieve the effects of avoiding adverse effects, low analysis detection limit, and high detection sensitivity.

Pending Publication Date: 2021-11-09
CHINA ELECTRONICS PROD RELIABILITY & ENVIRONMENTAL TESTING RES INST
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Problems solved by technology

[0005] Based on this, it is necessary to provide a micro-atmosphere sampling detection device and a micro-atmosphere sampling detection method for the problem that the internal atmosphere cannot be fully delivered to the detection and analysis part in the prior art

Method used

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Embodiment Construction

[0026] In order to make the above objects, features and advantages of the present invention more comprehensible, specific implementations of the present invention will be described in detail below in conjunction with the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. However, the present invention can be implemented in many other ways different from those described here, and those skilled in the art can make similar improvements without departing from the connotation of the present invention, so the present invention is not limited by the specific embodiments disclosed below.

[0027] In describing the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", " Back", "Left", "Right", "Vertical", "Horizontal", "Top", "Bottom", "Inner", "Outer", "Clockwise", "Counte...

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Abstract

The invention relates to a trace atmosphere sampling detection device and a trace atmosphere sampling detection method. The trace atmosphere sampling detection device comprises a hollow detection cavity and a vacuum system. The detection cavity is communicated with the vacuum system, and a testing device, a sample fixing device and a mass spectrometer are arranged in the detection cavity; the testing device and the sample fixing device are correspondingly arranged, the sample fixing device is used for fixedly arranging a sample, the testing device can destroy the airtight seal of the sample, and the mass spectrometer analyzes the atmosphere escaped from the sample. An internal atmosphere sampling structure and a detection analysis structure are arranged in the same cavity, compared with the prior art, a structure with a space dead angle does not need to be arranged any more, the adverse effect on diffusion of the internal atmosphere of the sample is avoided, even if the atmosphere gas in the sample is very small, the atmosphere gas can be fully diffused in the detection cavity, the mass spectrometer can obtain, test and analyze the data. The trace atmosphere sampling and detecting device disclosed by the invention has the characteristics of high detection sensitivity and low analysis and detection limit.

Description

technical field [0001] The invention relates to the technical field of electronic information, in particular to a trace atmosphere sampling detection device and a trace atmosphere sampling detection method. Background technique [0002] The packaging classification of microelectronic devices can be divided into hermetic packaging and non-sealed packaging according to the sealing form. Among them, the packaging materials of the hermetically sealed device include metal, ceramics, glass, etc., and the interior of the packaging structure is a cavity filled with high-purity nitrogen or other inert gases. In addition to the matrix gas, the atmosphere inside the cavity may also introduce water vapor, oxygen, carbon dioxide, and organic gases such as methanol, ethanol, acetone, and toluene released by the volatilization of organic materials during the packaging process of components to accelerate the corrosion of internal metals. , Leading to the decline of the insulation performan...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N1/22G01N27/62
CPCG01N1/22G01N27/62
Inventor 赵昊彭泽亚周斌赖灿雄
Owner CHINA ELECTRONICS PROD RELIABILITY & ENVIRONMENTAL TESTING RES INST
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