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Electric pump acceleration sensor and preparation method thereof

An acceleration sensor, electric pump technology, applied in the direction of measurement of acceleration, speed/acceleration/shock measurement, instruments, etc. The effect of low loss, lower system cost, and higher resolution

Pending Publication Date: 2021-11-09
NANJING UNIV OF POSTS & TELECOMM
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the existing integrated optical acceleration sensor needs to integrate an additional laser light source, so it is difficult to be compatible with the micromachining process and the device cannot be miniaturized, and it is difficult to achieve high-density optoelectronic integration

Method used

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  • Electric pump acceleration sensor and preparation method thereof
  • Electric pump acceleration sensor and preparation method thereof
  • Electric pump acceleration sensor and preparation method thereof

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Embodiment Construction

[0034] Below in conjunction with accompanying drawing, technical scheme of the present invention will be further described:

[0035] The present invention proposes an electric pump acceleration sensor, such as figure 1 , 2 As shown, the electric pump acceleration sensor mainly includes a proof mass 8 and a suspended waveguide structure, wherein the proof mass 8 is arranged in the middle of the suspended waveguide structure, and the suspended waveguide structure includes a silicon substrate layer 1, a u-type gallium nitride layer 2, an n-type GaN layer Gallium nitride layer 3 , quantum well layer 4 , p-type gallium nitride layer 5 , p-type electrode 6 and n-type electrode 7 . The n-type gallium nitride layer 3 is arranged on the u-type gallium nitride layer 2, and the cross-sections of the n-type gallium nitride layer 3 and the u-type gallium nitride layer 2 are consistent, and the quantum well layer 4 is arranged on the n-type gallium nitride layer. On one side of the upper ...

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Abstract

The invention discloses an electric pump acceleration sensor and a preparation method thereof, the acceleration sensor comprises a mass block and a suspended waveguide structure, and the mass block is arranged in the middle of the suspended waveguide structure; the suspended waveguide structure comprises a silicon substrate layer, a u-type gallium nitride layer, an n-type gallium nitride layer, a quantum well layer, a p-type gallium nitride layer, a p-type electrode and an n-type electrode which are sequentially arranged from bottom to top, the quantum well layer is arranged on one side of the upper surface of the n-type gallium nitride layer, and the silicon substrate layer supports the two ends below the u-type gallium nitride layer. According to the preparation method, the nitride microcavity with the suspended waveguide structure is prepared on a silicon substrate nitride epitaxial wafer by utilizing photoetching, ICP dry etching and silicon wet etching processes. According to the invention, the light source and the sensing device are focused on the gallium nitride suspended waveguide optical resonant cavity, and the prepared acceleration sensor can be subjected to high-density photoelectric integration and has higher resolution and sensitivity.

Description

technical field [0001] The invention relates to an electric pump acceleration sensor and a preparation method thereof, belonging to the technical field of acceleration sensor design and manufacture. Background technique [0002] Accelerometers can sense the inertial force generated by acceleration and convert it into an output signal that is easy to measure and analyze. Common accelerometers can be divided into piezoelectric, piezoresistive, capacitive, and servo types according to their working principles. In recent years, with the continuous progress of integrated manufacturing technology and micro-machining technology, micro-acceleration sensors are developing in the direction of miniaturization, high precision, integration, and intelligence, and are widely used in aerospace, earthquake monitoring, and automotive industries. field. Especially in the field of aerospace, more and more satellite navigation systems are adding inertial modules. When satellite navigation is no...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/093B81C1/00
CPCG01P15/093B81C1/00047Y02P70/50
Inventor 朱刚毅杨颖秦飞飞叶鹏
Owner NANJING UNIV OF POSTS & TELECOMM
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